Using STEM with quasi-parallel illumination and an automated peak-finding routine for strain analysis at the nanometre scale

Strain engineering has become an important tool to allow the semiconductor industry to meet roadmap requirements for device performance in the face of limits to device scaling. In addition, strain and/or lattice distortion through chemistry or mechanical stress, can have significant effect on mechan...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Sourty, E., Stanley, J., Freitag, B.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Capacitive sensors Chemistry Electronics industry Lattices Lighting Magnetic field induced strain Magnetic field measurement Magnetic materials Spatial resolution Strain measurement
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