Liquid delivery CVD of PLZT thick films for electro-optic applications

PLZT films in the composition range 7/0/100-32/0/100 have been deposited by CVD from a single source reagent using a liquid delivery/flash vaporization approach. Single phase perovskite films ranging in thickness from 1-5 /spl mu/m were deposited on fused silica substrates at 535/spl deg/C. The film...

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Bibliographische Detailangaben

Hauptverfasser:	Roeder, J.F., Bilodeau, S.M., Van Buskirk, P.C., Ozguz, V.H., Ma, J., Lee, S.H.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Birefringence Crystallography Electric variables measurement Electrodes Optical films Optical losses Phase measurement Silicon compounds Substrates Thick films
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