Correlation between improved stability and microstructural properties of a-Si:H and a-Ge:H

In this paper we report on comparative investigations concerning the stability of glow discharge and hot wire deposited a-Si:H films. Using spectroscopic ellipsometry measurements and a data interpretation based on a tetrahedron model we investigated the microstructural properties of the films. We f...

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Bibliographische Detailangaben

Hauptverfasser:	Haage, T., Bauer, S., Schroder, B., Oechsner, H.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Degradation Ellipsometry Glow discharges Hydrogen Metastasis Microstructure Semiconductor films Spectroscopy Stability Wire
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