Synthesis of sub-wavelength diffractive optical elements by 3D full-vectorial beam propagation method

The design method for nonperiodic sub-wavelength grating structure diffractive optical elements (DOEs) to be fabricated by direct-writing electron beam lithography in the polymer layer is described. The design is based on the application of 3D full-vectorial beam propagation method which is faster t...

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Bibliographische Detailangaben

Hauptverfasser:	Petruskevicius, R., Kezys, D., Mikolajunas, M., Grigaliunas, V., Baltrusaitis, J., Virzonis, D.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	computer generated holograms Design methodology Diffraction gratings diffractive optical elements Electron beams Electron optics electron-beam lithography Finite difference methods Lithography Optical diffraction Optical polymers Optical propagation sub-wavelength nonperiodic grating structure Time domain analysis vectorial beam propagation method
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