A fast-developing and low-cost characterization and test environment for a double axis resonating micromirror

Testing and characterization of micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS) can be very challenging due to the multi-domain nature of these devices. Nowadays high volume, high-cost, and accurate measuring systems are necessary to characterize and test ME...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Battini, F., Volpi, E., Marchetti, E., Cecchini, T., Sechi, F., Fanucci, L., Hofmann, U.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Finite element methods Frequency measurement Intelligent sensors Microelectromechanical systems Micromechanical devices Micromirrors Resonance Resonant frequency System testing Volume measurement
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