New on-chip screening of gate oxides smart power devices for automotive applications

Efficient screening procedures for the control of the gate oxide defectivity are vital to limit early failures especially in critical automotive applications. Traditional strategies based on burn-in and in-line tests are able to provide the required level of reliability but they are expensive and ti...

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Bibliographische Detailangaben
Hauptverfasser: Malandruccolo, V., Ciappa, M., Rothleitner, H., Fichtner, W.
Format: Tagungsbericht
Sprache:eng
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