A numerical approach to the efficient analysis of 2D RF-MEMS capacitor with accelerated motion

The advancement in new numerical technique is the key to success of newer generation RF MEMS devices. In this paper, a novel time-domain modeling technique that has the capability to accurately simulate the transient effect of RF MEMS variable capacitors with accelerated motion controlled by the cou...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Sahrani, S., Osman, M.S., Kuroda, M.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Acceleration Capacitors Computational modeling Electric variables control Force control Mechanical variables control Motion analysis Motion control Radiofrequency microelectromechanical systems Time domain analysis
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