A numerical approach to the efficient analysis of 2D RF-MEMS capacitor with accelerated motion
The advancement in new numerical technique is the key to success of newer generation RF MEMS devices. In this paper, a novel time-domain modeling technique that has the capability to accurately simulate the transient effect of RF MEMS variable capacitors with accelerated motion controlled by the cou...
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| creator | Sahrani, S. Osman, M.S. Kuroda, M. |
| description | The advancement in new numerical technique is the key to success of newer generation RF MEMS devices. In this paper, a novel time-domain modeling technique that has the capability to accurately simulate the transient effect of RF MEMS variable capacitors with accelerated motion controlled by the coupling of the electrostatic and mechanical forces is presented. The relation between the sinusoidal modulations of the frequency with the acceleration is shown. Its validity has been demonstrated in comparison between the computational results of the displacement with the theoretical results. Both results are in very good agreement. The next work will be considered to include the damping coefficient. Due to its numerical efficiency, the proposed technique can be a useful technique, which makes it suitable for the numerical analysis of the moving boundary problem in the near future. |
| doi_str_mv | 10.1109/APS.2009.5172148 |
| format | Conference Proceeding |
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In this paper, a novel time-domain modeling technique that has the capability to accurately simulate the transient effect of RF MEMS variable capacitors with accelerated motion controlled by the coupling of the electrostatic and mechanical forces is presented. The relation between the sinusoidal modulations of the frequency with the acceleration is shown. Its validity has been demonstrated in comparison between the computational results of the displacement with the theoretical results. Both results are in very good agreement. The next work will be considered to include the damping coefficient. Due to its numerical efficiency, the proposed technique can be a useful technique, which makes it suitable for the numerical analysis of the moving boundary problem in the near future.</description><identifier>ISSN: 1522-3965</identifier><identifier>ISBN: 9781424436477</identifier><identifier>ISBN: 1424436478</identifier><identifier>EISSN: 1947-1491</identifier><identifier>DOI: 10.1109/APS.2009.5172148</identifier><identifier>LCCN: 90-640397</identifier><language>eng</language><publisher>IEEE</publisher><subject>Acceleration ; Capacitors ; Computational modeling ; Electric variables control ; Force control ; Mechanical variables control ; Motion analysis ; Motion control ; Radiofrequency microelectromechanical systems ; Time domain analysis</subject><ispartof>2009 IEEE Antennas and Propagation Society International Symposium, 2009, p.1-4</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/5172148$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2058,27925,54920</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/5172148$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Sahrani, S.</creatorcontrib><creatorcontrib>Osman, M.S.</creatorcontrib><creatorcontrib>Kuroda, M.</creatorcontrib><title>A numerical approach to the efficient analysis of 2D RF-MEMS capacitor with accelerated motion</title><title>2009 IEEE Antennas and Propagation Society International Symposium</title><addtitle>APS</addtitle><description>The advancement in new numerical technique is the key to success of newer generation RF MEMS devices. In this paper, a novel time-domain modeling technique that has the capability to accurately simulate the transient effect of RF MEMS variable capacitors with accelerated motion controlled by the coupling of the electrostatic and mechanical forces is presented. The relation between the sinusoidal modulations of the frequency with the acceleration is shown. Its validity has been demonstrated in comparison between the computational results of the displacement with the theoretical results. Both results are in very good agreement. The next work will be considered to include the damping coefficient. Due to its numerical efficiency, the proposed technique can be a useful technique, which makes it suitable for the numerical analysis of the moving boundary problem in the near future.</description><subject>Acceleration</subject><subject>Capacitors</subject><subject>Computational modeling</subject><subject>Electric variables control</subject><subject>Force control</subject><subject>Mechanical variables control</subject><subject>Motion analysis</subject><subject>Motion control</subject><subject>Radiofrequency microelectromechanical systems</subject><subject>Time domain analysis</subject><issn>1522-3965</issn><issn>1947-1491</issn><isbn>9781424436477</isbn><isbn>1424436478</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2009</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotkEFLwzAYQIM6cM7dBS_5A53Jl6RpjmNuKmwobmdH-vULi3RtaSOyfz_Bnd7hwTs8xh6kmEkp3NP8YzsDIdzMSAtSF1dsLJ22mdROXrOps4XUoLXKtbU3f84AZMrlZsTGTmS5FsrZW3Y3DN9CgLLSjNnXnDc_R-oj-pr7rutbjweeWp4OxCmEiJGaxH3j69MQB94GDs_8c5VtlpstR995jKnt-W9MB-4RqabeJ6r4sU2xbe7ZKPh6oOmFE7ZbLXeL12z9_vK2mK-z6ETKSi1MnhvnAoAuEYCcB4lVWVRoNCmrS0USTbDg8yB9qLCQlKPyTiMgqAl7_M9GItp3fTz6_rS_XFJn7L5XNw</recordid><startdate>200906</startdate><enddate>200906</enddate><creator>Sahrani, S.</creator><creator>Osman, M.S.</creator><creator>Kuroda, M.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>200906</creationdate><title>A numerical approach to the efficient analysis of 2D RF-MEMS capacitor with accelerated motion</title><author>Sahrani, S. ; Osman, M.S. ; Kuroda, M.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i90t-b40566599f224bc22e9a21cdb8dc54e374b3e1c5f72a6f1afdc81e6c3a94c2c23</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2009</creationdate><topic>Acceleration</topic><topic>Capacitors</topic><topic>Computational modeling</topic><topic>Electric variables control</topic><topic>Force control</topic><topic>Mechanical variables control</topic><topic>Motion analysis</topic><topic>Motion control</topic><topic>Radiofrequency microelectromechanical systems</topic><topic>Time domain analysis</topic><toplevel>online_resources</toplevel><creatorcontrib>Sahrani, S.</creatorcontrib><creatorcontrib>Osman, M.S.</creatorcontrib><creatorcontrib>Kuroda, M.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Sahrani, S.</au><au>Osman, M.S.</au><au>Kuroda, M.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>A numerical approach to the efficient analysis of 2D RF-MEMS capacitor with accelerated motion</atitle><btitle>2009 IEEE Antennas and Propagation Society International Symposium</btitle><stitle>APS</stitle><date>2009-06</date><risdate>2009</risdate><spage>1</spage><epage>4</epage><pages>1-4</pages><issn>1522-3965</issn><eissn>1947-1491</eissn><isbn>9781424436477</isbn><isbn>1424436478</isbn><abstract>The advancement in new numerical technique is the key to success of newer generation RF MEMS devices. In this paper, a novel time-domain modeling technique that has the capability to accurately simulate the transient effect of RF MEMS variable capacitors with accelerated motion controlled by the coupling of the electrostatic and mechanical forces is presented. The relation between the sinusoidal modulations of the frequency with the acceleration is shown. Its validity has been demonstrated in comparison between the computational results of the displacement with the theoretical results. Both results are in very good agreement. The next work will be considered to include the damping coefficient. Due to its numerical efficiency, the proposed technique can be a useful technique, which makes it suitable for the numerical analysis of the moving boundary problem in the near future.</abstract><pub>IEEE</pub><doi>10.1109/APS.2009.5172148</doi><tpages>4</tpages></addata></record> |
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| ispartof | 2009 IEEE Antennas and Propagation Society International Symposium, 2009, p.1-4 |
| issn | 1522-3965 1947-1491 |
| language | eng |
| recordid | cdi_ieee_primary_5172148 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Acceleration Capacitors Computational modeling Electric variables control Force control Mechanical variables control Motion analysis Motion control Radiofrequency microelectromechanical systems Time domain analysis |
| title | A numerical approach to the efficient analysis of 2D RF-MEMS capacitor with accelerated motion |
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