Isolated acoustic wave based on AlN/ZnO/diamond structure for sensor applications
We present a theoretical calculation and experimental results for an isolated acoustic wave. The experimental device is modeled by finite element method (FEM) for the structure AlN/ZnO/diamond. The phase velocity in the AlN/ZnO/diamond structure was investigated by theoretical calculations. It was f...
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| creator | Le Brizoual, L. Omar, E. Sergei, Z. Akram, S. Frederic, S. Abdou, D.M. |
| description | We present a theoretical calculation and experimental results for an isolated acoustic wave. The experimental device is modeled by finite element method (FEM) for the structure AlN/ZnO/diamond. The phase velocity in the AlN/ZnO/diamond structure was investigated by theoretical calculations. It was found that the AlN thickness must be at least more than 3lambda/2 to obtain a negligible surface displacement. In the same way the ZnO thickness for a fixed value of AlN at 2lambda must be higher than lambda/4 to confine the acoustic wave. The coupling of the wave presents an optimum around lambda/2 for the ZnO layer thichness. |
| doi_str_mv | 10.1109/FREQ.2009.5168191 |
| format | Conference Proceeding |
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The experimental device is modeled by finite element method (FEM) for the structure AlN/ZnO/diamond. The phase velocity in the AlN/ZnO/diamond structure was investigated by theoretical calculations. It was found that the AlN thickness must be at least more than 3lambda/2 to obtain a negligible surface displacement. In the same way the ZnO thickness for a fixed value of AlN at 2lambda must be higher than lambda/4 to confine the acoustic wave. 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The coupling of the wave presents an optimum around lambda/2 for the ZnO layer thichness.</description><subject>Acoustic devices</subject><subject>Acoustic materials</subject><subject>Acoustic propagation</subject><subject>Acoustic sensors</subject><subject>Acoustic waves</subject><subject>Finite element methods</subject><subject>Finite element modeling</subject><subject>Isolated acoustic wave</subject><subject>Piezoelectric materials</subject><subject>Surface acoustic wave devices</subject><subject>Surface acoustic waves</subject><subject>Zinc oxide</subject><issn>2327-1914</issn><isbn>1424435110</isbn><isbn>9781424435111</isbn><isbn>1424435102</isbn><isbn>9781424435104</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2009</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNpFUM1Kw0AYXNGCsfYBxMu-QNLv29_ssZRWC8VS0YuXst3dwEqahGyq-PYGLHiZYYaZOQwhDwgFIpj5-nW1LxiAKSSqEg1ekTsUTAguEdj1v0C4IRnjTOdjSExIVupcScFA35JZSp8AgEbpsZWR_Sa1tR2Cp9a15zRER7_tV6BHm0avbeiifpl_NLu5j_bUNp6moT-74dwHWrU9TaFJI9muq6OzQ2ybdE8mla1TmF14St7Xq7flc77dPW2Wi20eUcsh91iWyoAC9GFEzzQHLI_WMMbRo7OqVBVXlbRGahaCAw9GBOFQOu2451Py-LcbQwiHro8n2_8cLtfwXzOXUyA</recordid><startdate>200904</startdate><enddate>200904</enddate><creator>Le Brizoual, L.</creator><creator>Omar, E.</creator><creator>Sergei, Z.</creator><creator>Akram, S.</creator><creator>Frederic, S.</creator><creator>Abdou, D.M.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>200904</creationdate><title>Isolated acoustic wave based on AlN/ZnO/diamond structure for sensor applications</title><author>Le Brizoual, L. ; Omar, E. ; Sergei, Z. ; Akram, S. ; Frederic, S. ; Abdou, D.M.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-d188690601de060d273018ba92231d1ca686f36f5a9572eec0d094e4c15c7c3d3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2009</creationdate><topic>Acoustic devices</topic><topic>Acoustic materials</topic><topic>Acoustic propagation</topic><topic>Acoustic sensors</topic><topic>Acoustic waves</topic><topic>Finite element methods</topic><topic>Finite element modeling</topic><topic>Isolated acoustic wave</topic><topic>Piezoelectric materials</topic><topic>Surface acoustic wave devices</topic><topic>Surface acoustic waves</topic><topic>Zinc oxide</topic><toplevel>online_resources</toplevel><creatorcontrib>Le Brizoual, L.</creatorcontrib><creatorcontrib>Omar, E.</creatorcontrib><creatorcontrib>Sergei, Z.</creatorcontrib><creatorcontrib>Akram, S.</creatorcontrib><creatorcontrib>Frederic, S.</creatorcontrib><creatorcontrib>Abdou, D.M.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Le Brizoual, L.</au><au>Omar, E.</au><au>Sergei, Z.</au><au>Akram, S.</au><au>Frederic, S.</au><au>Abdou, D.M.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Isolated acoustic wave based on AlN/ZnO/diamond structure for sensor applications</atitle><btitle>2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time forum</btitle><stitle>FREQ</stitle><date>2009-04</date><risdate>2009</risdate><spage>305</spage><epage>308</epage><pages>305-308</pages><issn>2327-1914</issn><isbn>1424435110</isbn><isbn>9781424435111</isbn><eisbn>1424435102</eisbn><eisbn>9781424435104</eisbn><abstract>We present a theoretical calculation and experimental results for an isolated acoustic wave. The experimental device is modeled by finite element method (FEM) for the structure AlN/ZnO/diamond. The phase velocity in the AlN/ZnO/diamond structure was investigated by theoretical calculations. It was found that the AlN thickness must be at least more than 3lambda/2 to obtain a negligible surface displacement. In the same way the ZnO thickness for a fixed value of AlN at 2lambda must be higher than lambda/4 to confine the acoustic wave. The coupling of the wave presents an optimum around lambda/2 for the ZnO layer thichness.</abstract><pub>IEEE</pub><doi>10.1109/FREQ.2009.5168191</doi><tpages>4</tpages></addata></record> |
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| ispartof | 2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time forum, 2009, p.305-308 |
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| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Acoustic devices Acoustic materials Acoustic propagation Acoustic sensors Acoustic waves Finite element methods Finite element modeling Isolated acoustic wave Piezoelectric materials Surface acoustic wave devices Surface acoustic waves Zinc oxide |
| title | Isolated acoustic wave based on AlN/ZnO/diamond structure for sensor applications |
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