Design and experimental validation of a nonlinear tracking control law for an electrostatic micromirror

This work aims at demonstrating potential benefits of applying nonlinear control techniques to electrostatic micromirrors in order to extend their stable operational range and enhance the system's performance. A nonlinear tracking control based on feedback linearization and trajectory planning...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Agudelo, C.G., Packirisamy, M., Guchuan Zhu, Saydy, L.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 4207
container_issue
container_start_page 4202
container_title
container_volume
creator Agudelo, C.G.
Packirisamy, M.
Guchuan Zhu
Saydy, L.
description This work aims at demonstrating potential benefits of applying nonlinear control techniques to electrostatic micromirrors in order to extend their stable operational range and enhance the system's performance. A nonlinear tracking control based on feedback linearization and trajectory planning has been developed. Aspects essential to the implementation of such a system, such as prevention of the device from its destruction on contact, modeling and sensing schemes allowing for the removal of on-chip sensors, influence of the dynamics of the driving circuit on the performance, and characterization of the device, have been thoroughly addressed and practical solutions have been proposed. The experimentation is performed on a set-up built with low cost, commercial off-the-shelf (COTS) instruments and components in an ordinary laboratory environment. The experimental results show that the developed control system can achieve a stable operation beyond the pull-in position for both set-point and scanning controls.
doi_str_mv 10.1109/ACC.2009.5160353
format Conference Proceeding
fullrecord <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_5160353</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>5160353</ieee_id><sourcerecordid>5160353</sourcerecordid><originalsourceid>FETCH-LOGICAL-i175t-3c3836b33dcac7241a772656124390cfd4827061ce25db6ab378c33ba18524713</originalsourceid><addsrcrecordid>eNpFkMtqwzAURNUXNEm7L3SjH3CqqytL9jK4Twh000J34VqWg1pFCrLp4-9raKCrgRlm4AxjVyCWAKK-WTXNUgpRL0vQAks8YnNQUilVSlUds5lEUxVlpeHkP8C3UzYTRmEBGupzNh-GdyGgrrWYse2tG_w2coodd997l_3OxZEC_6TgOxp9ijz1nHhMMfjoKPMxk_3wccttimNOgQf64n3K0wZ3wdnJG8apafnO25x2PueUL9hZT2FwlwddsNf7u5fmsVg_Pzw1q3XhwZRjgRYr1C1iZ8kaqYCMkbrUIBXWwvadqqQRGqyTZddqaidei9gSVNMDBnDBrv92vXNus59wKP9sDm_hL1_uWs0</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>Design and experimental validation of a nonlinear tracking control law for an electrostatic micromirror</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Agudelo, C.G. ; Packirisamy, M. ; Guchuan Zhu ; Saydy, L.</creator><creatorcontrib>Agudelo, C.G. ; Packirisamy, M. ; Guchuan Zhu ; Saydy, L.</creatorcontrib><description>This work aims at demonstrating potential benefits of applying nonlinear control techniques to electrostatic micromirrors in order to extend their stable operational range and enhance the system's performance. A nonlinear tracking control based on feedback linearization and trajectory planning has been developed. Aspects essential to the implementation of such a system, such as prevention of the device from its destruction on contact, modeling and sensing schemes allowing for the removal of on-chip sensors, influence of the dynamics of the driving circuit on the performance, and characterization of the device, have been thoroughly addressed and practical solutions have been proposed. The experimentation is performed on a set-up built with low cost, commercial off-the-shelf (COTS) instruments and components in an ordinary laboratory environment. The experimental results show that the developed control system can achieve a stable operation beyond the pull-in position for both set-point and scanning controls.</description><identifier>ISSN: 0743-1619</identifier><identifier>ISBN: 142444523X</identifier><identifier>ISBN: 9781424445233</identifier><identifier>EISSN: 2378-5861</identifier><identifier>EISBN: 1424445248</identifier><identifier>EISBN: 9781424445240</identifier><identifier>DOI: 10.1109/ACC.2009.5160353</identifier><language>eng</language><publisher>IEEE</publisher><subject>Control systems ; Electrostatics ; Linear feedback control systems ; Micromirrors ; Nonlinear control systems ; Sensor phenomena and characterization ; Sensor systems ; System performance ; System-on-a-chip ; Trajectory</subject><ispartof>2009 American Control Conference, 2009, p.4202-4207</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/5160353$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,776,780,785,786,2052,27902,54895</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/5160353$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Agudelo, C.G.</creatorcontrib><creatorcontrib>Packirisamy, M.</creatorcontrib><creatorcontrib>Guchuan Zhu</creatorcontrib><creatorcontrib>Saydy, L.</creatorcontrib><title>Design and experimental validation of a nonlinear tracking control law for an electrostatic micromirror</title><title>2009 American Control Conference</title><addtitle>ACC</addtitle><description>This work aims at demonstrating potential benefits of applying nonlinear control techniques to electrostatic micromirrors in order to extend their stable operational range and enhance the system's performance. A nonlinear tracking control based on feedback linearization and trajectory planning has been developed. Aspects essential to the implementation of such a system, such as prevention of the device from its destruction on contact, modeling and sensing schemes allowing for the removal of on-chip sensors, influence of the dynamics of the driving circuit on the performance, and characterization of the device, have been thoroughly addressed and practical solutions have been proposed. The experimentation is performed on a set-up built with low cost, commercial off-the-shelf (COTS) instruments and components in an ordinary laboratory environment. The experimental results show that the developed control system can achieve a stable operation beyond the pull-in position for both set-point and scanning controls.</description><subject>Control systems</subject><subject>Electrostatics</subject><subject>Linear feedback control systems</subject><subject>Micromirrors</subject><subject>Nonlinear control systems</subject><subject>Sensor phenomena and characterization</subject><subject>Sensor systems</subject><subject>System performance</subject><subject>System-on-a-chip</subject><subject>Trajectory</subject><issn>0743-1619</issn><issn>2378-5861</issn><isbn>142444523X</isbn><isbn>9781424445233</isbn><isbn>1424445248</isbn><isbn>9781424445240</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2009</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNpFkMtqwzAURNUXNEm7L3SjH3CqqytL9jK4Twh000J34VqWg1pFCrLp4-9raKCrgRlm4AxjVyCWAKK-WTXNUgpRL0vQAks8YnNQUilVSlUds5lEUxVlpeHkP8C3UzYTRmEBGupzNh-GdyGgrrWYse2tG_w2coodd997l_3OxZEC_6TgOxp9ijz1nHhMMfjoKPMxk_3wccttimNOgQf64n3K0wZ3wdnJG8apafnO25x2PueUL9hZT2FwlwddsNf7u5fmsVg_Pzw1q3XhwZRjgRYr1C1iZ8kaqYCMkbrUIBXWwvadqqQRGqyTZddqaidei9gSVNMDBnDBrv92vXNus59wKP9sDm_hL1_uWs0</recordid><startdate>200906</startdate><enddate>200906</enddate><creator>Agudelo, C.G.</creator><creator>Packirisamy, M.</creator><creator>Guchuan Zhu</creator><creator>Saydy, L.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>200906</creationdate><title>Design and experimental validation of a nonlinear tracking control law for an electrostatic micromirror</title><author>Agudelo, C.G. ; Packirisamy, M. ; Guchuan Zhu ; Saydy, L.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-3c3836b33dcac7241a772656124390cfd4827061ce25db6ab378c33ba18524713</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2009</creationdate><topic>Control systems</topic><topic>Electrostatics</topic><topic>Linear feedback control systems</topic><topic>Micromirrors</topic><topic>Nonlinear control systems</topic><topic>Sensor phenomena and characterization</topic><topic>Sensor systems</topic><topic>System performance</topic><topic>System-on-a-chip</topic><topic>Trajectory</topic><toplevel>online_resources</toplevel><creatorcontrib>Agudelo, C.G.</creatorcontrib><creatorcontrib>Packirisamy, M.</creatorcontrib><creatorcontrib>Guchuan Zhu</creatorcontrib><creatorcontrib>Saydy, L.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Agudelo, C.G.</au><au>Packirisamy, M.</au><au>Guchuan Zhu</au><au>Saydy, L.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Design and experimental validation of a nonlinear tracking control law for an electrostatic micromirror</atitle><btitle>2009 American Control Conference</btitle><stitle>ACC</stitle><date>2009-06</date><risdate>2009</risdate><spage>4202</spage><epage>4207</epage><pages>4202-4207</pages><issn>0743-1619</issn><eissn>2378-5861</eissn><isbn>142444523X</isbn><isbn>9781424445233</isbn><eisbn>1424445248</eisbn><eisbn>9781424445240</eisbn><abstract>This work aims at demonstrating potential benefits of applying nonlinear control techniques to electrostatic micromirrors in order to extend their stable operational range and enhance the system's performance. A nonlinear tracking control based on feedback linearization and trajectory planning has been developed. Aspects essential to the implementation of such a system, such as prevention of the device from its destruction on contact, modeling and sensing schemes allowing for the removal of on-chip sensors, influence of the dynamics of the driving circuit on the performance, and characterization of the device, have been thoroughly addressed and practical solutions have been proposed. The experimentation is performed on a set-up built with low cost, commercial off-the-shelf (COTS) instruments and components in an ordinary laboratory environment. The experimental results show that the developed control system can achieve a stable operation beyond the pull-in position for both set-point and scanning controls.</abstract><pub>IEEE</pub><doi>10.1109/ACC.2009.5160353</doi><tpages>6</tpages></addata></record>
fulltext fulltext_linktorsrc
identifier ISSN: 0743-1619
ispartof 2009 American Control Conference, 2009, p.4202-4207
issn 0743-1619
2378-5861
language eng
recordid cdi_ieee_primary_5160353
source IEEE Electronic Library (IEL) Conference Proceedings
subjects Control systems
Electrostatics
Linear feedback control systems
Micromirrors
Nonlinear control systems
Sensor phenomena and characterization
Sensor systems
System performance
System-on-a-chip
Trajectory
title Design and experimental validation of a nonlinear tracking control law for an electrostatic micromirror
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-30T11%3A05%3A55IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=Design%20and%20experimental%20validation%20of%20a%20nonlinear%20tracking%20control%20law%20for%20an%20electrostatic%20micromirror&rft.btitle=2009%20American%20Control%20Conference&rft.au=Agudelo,%20C.G.&rft.date=2009-06&rft.spage=4202&rft.epage=4207&rft.pages=4202-4207&rft.issn=0743-1619&rft.eissn=2378-5861&rft.isbn=142444523X&rft.isbn_list=9781424445233&rft_id=info:doi/10.1109/ACC.2009.5160353&rft_dat=%3Cieee_6IE%3E5160353%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&rft.eisbn=1424445248&rft.eisbn_list=9781424445240&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=5160353&rfr_iscdi=true