New Generation of Digital Microfluidic Devices

This paper reports on the design, fabrication, and performance of micro-sized fluidic devices that use electrowetting to control and transport liquids. Using standard microfabrication techniques, new pumping systems are developed with significantly more capability than open digital microfluidic syst...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Journal of microelectromechanical systems 2009-08, Vol.18 (4), p.845-851
Hauptverfasser: Kedzierski, J., Berry, S., Abedian, B.
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 851
container_issue 4
container_start_page 845
container_title Journal of microelectromechanical systems
container_volume 18
creator Kedzierski, J.
Berry, S.
Abedian, B.
description This paper reports on the design, fabrication, and performance of micro-sized fluidic devices that use electrowetting to control and transport liquids. Using standard microfabrication techniques, new pumping systems are developed with significantly more capability than open digital microfluidic systems that are often associated with electrowetting. This paper demonstrates that, by integrating closed microchannels with different channel heights and using electrowetting actuation, liquid interfaces can be controlled, and pressure work can be done, resulting in fluid pumping. The operation of two different on-chip pumps and devices that can form water drops is described. In addition, a theory is presented to explain the details of single-electrode actuation in a closed channel.
doi_str_mv 10.1109/JMEMS.2009.2023845
format Article
fullrecord <record><control><sourceid>proquest_RIE</sourceid><recordid>TN_cdi_ieee_primary_5159376</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>5159376</ieee_id><sourcerecordid>36339483</sourcerecordid><originalsourceid>FETCH-LOGICAL-c464t-21e9dcd81a15a9c605e94533edd7f4f9133f0850818a106d980a2217523537073</originalsourceid><addsrcrecordid>eNp9kTtPwzAQxyMEEqXwBWCJkHgsKXd-xPaI2lJALQzAbFmOg1ylCcQtiG-PQ6sODF3uTrrfPf9JcoowQAR18zgbz14GBEBFQ6hkfC_poWKYAXK5H2PgIhPIxWFyFMIcABmTeS8ZPLnvdOJq15qlb-q0KdORf_dLU6Uzb9umrFa-8DYduS9vXThODkpTBXey8f3k7W78OrzPps-Th-HtNLMsZ8uMoFOFLSQa5EbZHLhTjFPqikKUrFRIaQmSg0RpEPJCSTCEoOCEcipA0H5yte770TafKxeWeuGDdVVlatesgpaCd2cij-TlTpLmlComaQSvd4KYC2RUgeqmn_9D582qrePBWiGhORcEIkTWUPxSCK0r9UfrF6b90Qi6E0X_iaI7UfRGlFh0selsgjVV2Zra-rCtJCjjGrLjztacd85t0xy5oiKnvxZkkN8</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>912365720</pqid></control><display><type>article</type><title>New Generation of Digital Microfluidic Devices</title><source>IEEE Electronic Library (IEL)</source><creator>Kedzierski, J. ; Berry, S. ; Abedian, B.</creator><creatorcontrib>Kedzierski, J. ; Berry, S. ; Abedian, B.</creatorcontrib><description>This paper reports on the design, fabrication, and performance of micro-sized fluidic devices that use electrowetting to control and transport liquids. Using standard microfabrication techniques, new pumping systems are developed with significantly more capability than open digital microfluidic systems that are often associated with electrowetting. This paper demonstrates that, by integrating closed microchannels with different channel heights and using electrowetting actuation, liquid interfaces can be controlled, and pressure work can be done, resulting in fluid pumping. The operation of two different on-chip pumps and devices that can form water drops is described. In addition, a theory is presented to explain the details of single-electrode actuation in a closed channel.</description><identifier>ISSN: 1057-7157</identifier><identifier>EISSN: 1941-0158</identifier><identifier>DOI: 10.1109/JMEMS.2009.2023845</identifier><identifier>CODEN: JMIYET</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Actuation ; Applied fluid mechanics ; Applied sciences ; Biotechnology ; Channels ; Condensed matter: structure, mechanical and thermal properties ; CYTOP ; Devices ; Digital ; digital microfluidics ; electrocapillary ; Electrodes ; electrowetting ; Exact sciences and technology ; Fabrication ; Fluid dynamics ; Fluidic microsystems ; Fluidics ; Fundamental areas of phenomenology (including applications) ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Liquids ; Mechanical engineering. Machine design ; Mechanical instruments, equipment and techniques ; Microchannel ; microchannels ; Microfluidics ; Micromechanical devices and systems ; Micropumps ; Physics ; Precision engineering, watch making ; Pressure control ; Pumping ; Pumps ; Solid-fluid interfaces ; Surface tension ; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) ; Water drops ; Wetting</subject><ispartof>Journal of microelectromechanical systems, 2009-08, Vol.18 (4), p.845-851</ispartof><rights>2009 INIST-CNRS</rights><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2009</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c464t-21e9dcd81a15a9c605e94533edd7f4f9133f0850818a106d980a2217523537073</citedby><cites>FETCH-LOGICAL-c464t-21e9dcd81a15a9c605e94533edd7f4f9133f0850818a106d980a2217523537073</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/5159376$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,778,782,794,27911,27912,54745</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/5159376$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&amp;idt=21816785$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Kedzierski, J.</creatorcontrib><creatorcontrib>Berry, S.</creatorcontrib><creatorcontrib>Abedian, B.</creatorcontrib><title>New Generation of Digital Microfluidic Devices</title><title>Journal of microelectromechanical systems</title><addtitle>JMEMS</addtitle><description>This paper reports on the design, fabrication, and performance of micro-sized fluidic devices that use electrowetting to control and transport liquids. Using standard microfabrication techniques, new pumping systems are developed with significantly more capability than open digital microfluidic systems that are often associated with electrowetting. This paper demonstrates that, by integrating closed microchannels with different channel heights and using electrowetting actuation, liquid interfaces can be controlled, and pressure work can be done, resulting in fluid pumping. The operation of two different on-chip pumps and devices that can form water drops is described. In addition, a theory is presented to explain the details of single-electrode actuation in a closed channel.</description><subject>Actuation</subject><subject>Applied fluid mechanics</subject><subject>Applied sciences</subject><subject>Biotechnology</subject><subject>Channels</subject><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>CYTOP</subject><subject>Devices</subject><subject>Digital</subject><subject>digital microfluidics</subject><subject>electrocapillary</subject><subject>Electrodes</subject><subject>electrowetting</subject><subject>Exact sciences and technology</subject><subject>Fabrication</subject><subject>Fluid dynamics</subject><subject>Fluidic microsystems</subject><subject>Fluidics</subject><subject>Fundamental areas of phenomenology (including applications)</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>Liquids</subject><subject>Mechanical engineering. Machine design</subject><subject>Mechanical instruments, equipment and techniques</subject><subject>Microchannel</subject><subject>microchannels</subject><subject>Microfluidics</subject><subject>Micromechanical devices and systems</subject><subject>Micropumps</subject><subject>Physics</subject><subject>Precision engineering, watch making</subject><subject>Pressure control</subject><subject>Pumping</subject><subject>Pumps</subject><subject>Solid-fluid interfaces</subject><subject>Surface tension</subject><subject>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</subject><subject>Water drops</subject><subject>Wetting</subject><issn>1057-7157</issn><issn>1941-0158</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2009</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNp9kTtPwzAQxyMEEqXwBWCJkHgsKXd-xPaI2lJALQzAbFmOg1ylCcQtiG-PQ6sODF3uTrrfPf9JcoowQAR18zgbz14GBEBFQ6hkfC_poWKYAXK5H2PgIhPIxWFyFMIcABmTeS8ZPLnvdOJq15qlb-q0KdORf_dLU6Uzb9umrFa-8DYduS9vXThODkpTBXey8f3k7W78OrzPps-Th-HtNLMsZ8uMoFOFLSQa5EbZHLhTjFPqikKUrFRIaQmSg0RpEPJCSTCEoOCEcipA0H5yte770TafKxeWeuGDdVVlatesgpaCd2cij-TlTpLmlComaQSvd4KYC2RUgeqmn_9D582qrePBWiGhORcEIkTWUPxSCK0r9UfrF6b90Qi6E0X_iaI7UfRGlFh0selsgjVV2Zra-rCtJCjjGrLjztacd85t0xy5oiKnvxZkkN8</recordid><startdate>20090801</startdate><enddate>20090801</enddate><creator>Kedzierski, J.</creator><creator>Berry, S.</creator><creator>Abedian, B.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7TB</scope><scope>7U5</scope><scope>8FD</scope><scope>FR3</scope><scope>L7M</scope><scope>F28</scope></search><sort><creationdate>20090801</creationdate><title>New Generation of Digital Microfluidic Devices</title><author>Kedzierski, J. ; Berry, S. ; Abedian, B.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c464t-21e9dcd81a15a9c605e94533edd7f4f9133f0850818a106d980a2217523537073</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2009</creationdate><topic>Actuation</topic><topic>Applied fluid mechanics</topic><topic>Applied sciences</topic><topic>Biotechnology</topic><topic>Channels</topic><topic>Condensed matter: structure, mechanical and thermal properties</topic><topic>CYTOP</topic><topic>Devices</topic><topic>Digital</topic><topic>digital microfluidics</topic><topic>electrocapillary</topic><topic>Electrodes</topic><topic>electrowetting</topic><topic>Exact sciences and technology</topic><topic>Fabrication</topic><topic>Fluid dynamics</topic><topic>Fluidic microsystems</topic><topic>Fluidics</topic><topic>Fundamental areas of phenomenology (including applications)</topic><topic>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</topic><topic>Liquids</topic><topic>Mechanical engineering. Machine design</topic><topic>Mechanical instruments, equipment and techniques</topic><topic>Microchannel</topic><topic>microchannels</topic><topic>Microfluidics</topic><topic>Micromechanical devices and systems</topic><topic>Micropumps</topic><topic>Physics</topic><topic>Precision engineering, watch making</topic><topic>Pressure control</topic><topic>Pumping</topic><topic>Pumps</topic><topic>Solid-fluid interfaces</topic><topic>Surface tension</topic><topic>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</topic><topic>Water drops</topic><topic>Wetting</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Kedzierski, J.</creatorcontrib><creatorcontrib>Berry, S.</creatorcontrib><creatorcontrib>Abedian, B.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics &amp; Communications Abstracts</collection><collection>Mechanical &amp; Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>ANTE: Abstracts in New Technology &amp; Engineering</collection><jtitle>Journal of microelectromechanical systems</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Kedzierski, J.</au><au>Berry, S.</au><au>Abedian, B.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>New Generation of Digital Microfluidic Devices</atitle><jtitle>Journal of microelectromechanical systems</jtitle><stitle>JMEMS</stitle><date>2009-08-01</date><risdate>2009</risdate><volume>18</volume><issue>4</issue><spage>845</spage><epage>851</epage><pages>845-851</pages><issn>1057-7157</issn><eissn>1941-0158</eissn><coden>JMIYET</coden><abstract>This paper reports on the design, fabrication, and performance of micro-sized fluidic devices that use electrowetting to control and transport liquids. Using standard microfabrication techniques, new pumping systems are developed with significantly more capability than open digital microfluidic systems that are often associated with electrowetting. This paper demonstrates that, by integrating closed microchannels with different channel heights and using electrowetting actuation, liquid interfaces can be controlled, and pressure work can be done, resulting in fluid pumping. The operation of two different on-chip pumps and devices that can form water drops is described. In addition, a theory is presented to explain the details of single-electrode actuation in a closed channel.</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/JMEMS.2009.2023845</doi><tpages>7</tpages><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier ISSN: 1057-7157
ispartof Journal of microelectromechanical systems, 2009-08, Vol.18 (4), p.845-851
issn 1057-7157
1941-0158
language eng
recordid cdi_ieee_primary_5159376
source IEEE Electronic Library (IEL)
subjects Actuation
Applied fluid mechanics
Applied sciences
Biotechnology
Channels
Condensed matter: structure, mechanical and thermal properties
CYTOP
Devices
Digital
digital microfluidics
electrocapillary
Electrodes
electrowetting
Exact sciences and technology
Fabrication
Fluid dynamics
Fluidic microsystems
Fluidics
Fundamental areas of phenomenology (including applications)
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Liquids
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Microchannel
microchannels
Microfluidics
Micromechanical devices and systems
Micropumps
Physics
Precision engineering, watch making
Pressure control
Pumping
Pumps
Solid-fluid interfaces
Surface tension
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Water drops
Wetting
title New Generation of Digital Microfluidic Devices
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-15T10%3A47%3A44IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_RIE&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=New%20Generation%20of%20Digital%20Microfluidic%20Devices&rft.jtitle=Journal%20of%20microelectromechanical%20systems&rft.au=Kedzierski,%20J.&rft.date=2009-08-01&rft.volume=18&rft.issue=4&rft.spage=845&rft.epage=851&rft.pages=845-851&rft.issn=1057-7157&rft.eissn=1941-0158&rft.coden=JMIYET&rft_id=info:doi/10.1109/JMEMS.2009.2023845&rft_dat=%3Cproquest_RIE%3E36339483%3C/proquest_RIE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=912365720&rft_id=info:pmid/&rft_ieee_id=5159376&rfr_iscdi=true