New Generation of Digital Microfluidic Devices
This paper reports on the design, fabrication, and performance of micro-sized fluidic devices that use electrowetting to control and transport liquids. Using standard microfabrication techniques, new pumping systems are developed with significantly more capability than open digital microfluidic syst...
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Veröffentlicht in: | Journal of microelectromechanical systems 2009-08, Vol.18 (4), p.845-851 |
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creator | Kedzierski, J. Berry, S. Abedian, B. |
description | This paper reports on the design, fabrication, and performance of micro-sized fluidic devices that use electrowetting to control and transport liquids. Using standard microfabrication techniques, new pumping systems are developed with significantly more capability than open digital microfluidic systems that are often associated with electrowetting. This paper demonstrates that, by integrating closed microchannels with different channel heights and using electrowetting actuation, liquid interfaces can be controlled, and pressure work can be done, resulting in fluid pumping. The operation of two different on-chip pumps and devices that can form water drops is described. In addition, a theory is presented to explain the details of single-electrode actuation in a closed channel. |
doi_str_mv | 10.1109/JMEMS.2009.2023845 |
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Using standard microfabrication techniques, new pumping systems are developed with significantly more capability than open digital microfluidic systems that are often associated with electrowetting. This paper demonstrates that, by integrating closed microchannels with different channel heights and using electrowetting actuation, liquid interfaces can be controlled, and pressure work can be done, resulting in fluid pumping. The operation of two different on-chip pumps and devices that can form water drops is described. In addition, a theory is presented to explain the details of single-electrode actuation in a closed channel.</description><identifier>ISSN: 1057-7157</identifier><identifier>EISSN: 1941-0158</identifier><identifier>DOI: 10.1109/JMEMS.2009.2023845</identifier><identifier>CODEN: JMIYET</identifier><language>eng</language><publisher>New York, NY: IEEE</publisher><subject>Actuation ; Applied fluid mechanics ; Applied sciences ; Biotechnology ; Channels ; Condensed matter: structure, mechanical and thermal properties ; CYTOP ; Devices ; Digital ; digital microfluidics ; electrocapillary ; Electrodes ; electrowetting ; Exact sciences and technology ; Fabrication ; Fluid dynamics ; Fluidic microsystems ; Fluidics ; Fundamental areas of phenomenology (including applications) ; Instruments, apparatus, components and techniques common to several branches of physics and astronomy ; Liquids ; Mechanical engineering. Machine design ; Mechanical instruments, equipment and techniques ; Microchannel ; microchannels ; Microfluidics ; Micromechanical devices and systems ; Micropumps ; Physics ; Precision engineering, watch making ; Pressure control ; Pumping ; Pumps ; Solid-fluid interfaces ; Surface tension ; Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties) ; Water drops ; Wetting</subject><ispartof>Journal of microelectromechanical systems, 2009-08, Vol.18 (4), p.845-851</ispartof><rights>2009 INIST-CNRS</rights><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2009</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c464t-21e9dcd81a15a9c605e94533edd7f4f9133f0850818a106d980a2217523537073</citedby><cites>FETCH-LOGICAL-c464t-21e9dcd81a15a9c605e94533edd7f4f9133f0850818a106d980a2217523537073</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/5159376$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>314,778,782,794,27911,27912,54745</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/5159376$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&idt=21816785$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>Kedzierski, J.</creatorcontrib><creatorcontrib>Berry, S.</creatorcontrib><creatorcontrib>Abedian, B.</creatorcontrib><title>New Generation of Digital Microfluidic Devices</title><title>Journal of microelectromechanical systems</title><addtitle>JMEMS</addtitle><description>This paper reports on the design, fabrication, and performance of micro-sized fluidic devices that use electrowetting to control and transport liquids. Using standard microfabrication techniques, new pumping systems are developed with significantly more capability than open digital microfluidic systems that are often associated with electrowetting. This paper demonstrates that, by integrating closed microchannels with different channel heights and using electrowetting actuation, liquid interfaces can be controlled, and pressure work can be done, resulting in fluid pumping. The operation of two different on-chip pumps and devices that can form water drops is described. In addition, a theory is presented to explain the details of single-electrode actuation in a closed channel.</description><subject>Actuation</subject><subject>Applied fluid mechanics</subject><subject>Applied sciences</subject><subject>Biotechnology</subject><subject>Channels</subject><subject>Condensed matter: structure, mechanical and thermal properties</subject><subject>CYTOP</subject><subject>Devices</subject><subject>Digital</subject><subject>digital microfluidics</subject><subject>electrocapillary</subject><subject>Electrodes</subject><subject>electrowetting</subject><subject>Exact sciences and technology</subject><subject>Fabrication</subject><subject>Fluid dynamics</subject><subject>Fluidic microsystems</subject><subject>Fluidics</subject><subject>Fundamental areas of phenomenology (including applications)</subject><subject>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</subject><subject>Liquids</subject><subject>Mechanical engineering. Machine design</subject><subject>Mechanical instruments, equipment and techniques</subject><subject>Microchannel</subject><subject>microchannels</subject><subject>Microfluidics</subject><subject>Micromechanical devices and systems</subject><subject>Micropumps</subject><subject>Physics</subject><subject>Precision engineering, watch making</subject><subject>Pressure control</subject><subject>Pumping</subject><subject>Pumps</subject><subject>Solid-fluid interfaces</subject><subject>Surface tension</subject><subject>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</subject><subject>Water drops</subject><subject>Wetting</subject><issn>1057-7157</issn><issn>1941-0158</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2009</creationdate><recordtype>article</recordtype><sourceid>RIE</sourceid><recordid>eNp9kTtPwzAQxyMEEqXwBWCJkHgsKXd-xPaI2lJALQzAbFmOg1ylCcQtiG-PQ6sODF3uTrrfPf9JcoowQAR18zgbz14GBEBFQ6hkfC_poWKYAXK5H2PgIhPIxWFyFMIcABmTeS8ZPLnvdOJq15qlb-q0KdORf_dLU6Uzb9umrFa-8DYduS9vXThODkpTBXey8f3k7W78OrzPps-Th-HtNLMsZ8uMoFOFLSQa5EbZHLhTjFPqikKUrFRIaQmSg0RpEPJCSTCEoOCEcipA0H5yte770TafKxeWeuGDdVVlatesgpaCd2cij-TlTpLmlComaQSvd4KYC2RUgeqmn_9D582qrePBWiGhORcEIkTWUPxSCK0r9UfrF6b90Qi6E0X_iaI7UfRGlFh0selsgjVV2Zra-rCtJCjjGrLjztacd85t0xy5oiKnvxZkkN8</recordid><startdate>20090801</startdate><enddate>20090801</enddate><creator>Kedzierski, J.</creator><creator>Berry, S.</creator><creator>Abedian, B.</creator><general>IEEE</general><general>Institute of Electrical and Electronics Engineers</general><general>The Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>97E</scope><scope>RIA</scope><scope>RIE</scope><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7SP</scope><scope>7TB</scope><scope>7U5</scope><scope>8FD</scope><scope>FR3</scope><scope>L7M</scope><scope>F28</scope></search><sort><creationdate>20090801</creationdate><title>New Generation of Digital Microfluidic Devices</title><author>Kedzierski, J. ; Berry, S. ; Abedian, B.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c464t-21e9dcd81a15a9c605e94533edd7f4f9133f0850818a106d980a2217523537073</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2009</creationdate><topic>Actuation</topic><topic>Applied fluid mechanics</topic><topic>Applied sciences</topic><topic>Biotechnology</topic><topic>Channels</topic><topic>Condensed matter: structure, mechanical and thermal properties</topic><topic>CYTOP</topic><topic>Devices</topic><topic>Digital</topic><topic>digital microfluidics</topic><topic>electrocapillary</topic><topic>Electrodes</topic><topic>electrowetting</topic><topic>Exact sciences and technology</topic><topic>Fabrication</topic><topic>Fluid dynamics</topic><topic>Fluidic microsystems</topic><topic>Fluidics</topic><topic>Fundamental areas of phenomenology (including applications)</topic><topic>Instruments, apparatus, components and techniques common to several branches of physics and astronomy</topic><topic>Liquids</topic><topic>Mechanical engineering. Machine design</topic><topic>Mechanical instruments, equipment and techniques</topic><topic>Microchannel</topic><topic>microchannels</topic><topic>Microfluidics</topic><topic>Micromechanical devices and systems</topic><topic>Micropumps</topic><topic>Physics</topic><topic>Precision engineering, watch making</topic><topic>Pressure control</topic><topic>Pumping</topic><topic>Pumps</topic><topic>Solid-fluid interfaces</topic><topic>Surface tension</topic><topic>Surfaces and interfaces; thin films and whiskers (structure and nonelectronic properties)</topic><topic>Water drops</topic><topic>Wetting</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Kedzierski, J.</creatorcontrib><creatorcontrib>Berry, S.</creatorcontrib><creatorcontrib>Abedian, B.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE Electronic Library (IEL)</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Mechanical & Transportation Engineering Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Engineering Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><jtitle>Journal of microelectromechanical systems</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Kedzierski, J.</au><au>Berry, S.</au><au>Abedian, B.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>New Generation of Digital Microfluidic Devices</atitle><jtitle>Journal of microelectromechanical systems</jtitle><stitle>JMEMS</stitle><date>2009-08-01</date><risdate>2009</risdate><volume>18</volume><issue>4</issue><spage>845</spage><epage>851</epage><pages>845-851</pages><issn>1057-7157</issn><eissn>1941-0158</eissn><coden>JMIYET</coden><abstract>This paper reports on the design, fabrication, and performance of micro-sized fluidic devices that use electrowetting to control and transport liquids. Using standard microfabrication techniques, new pumping systems are developed with significantly more capability than open digital microfluidic systems that are often associated with electrowetting. This paper demonstrates that, by integrating closed microchannels with different channel heights and using electrowetting actuation, liquid interfaces can be controlled, and pressure work can be done, resulting in fluid pumping. The operation of two different on-chip pumps and devices that can form water drops is described. In addition, a theory is presented to explain the details of single-electrode actuation in a closed channel.</abstract><cop>New York, NY</cop><pub>IEEE</pub><doi>10.1109/JMEMS.2009.2023845</doi><tpages>7</tpages><oa>free_for_read</oa></addata></record> |
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subjects | Actuation Applied fluid mechanics Applied sciences Biotechnology Channels Condensed matter: structure, mechanical and thermal properties CYTOP Devices Digital digital microfluidics electrocapillary Electrodes electrowetting Exact sciences and technology Fabrication Fluid dynamics Fluidic microsystems Fluidics Fundamental areas of phenomenology (including applications) Instruments, apparatus, components and techniques common to several branches of physics and astronomy Liquids Mechanical engineering. Machine design Mechanical instruments, equipment and techniques Microchannel microchannels Microfluidics Micromechanical devices and systems Micropumps Physics Precision engineering, watch making Pressure control Pumping Pumps Solid-fluid interfaces Surface tension Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Water drops Wetting |
title | New Generation of Digital Microfluidic Devices |
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