"Green" process and productivity improvements in a GaAs light emitting diode wafer fab

"Green" process and productivity improvements in a GaAs light emitting diode wafer fab

A self directed process improvement team was initiated to streamline the GaAs light emitting diode (LED) wafer process flow and enhance product yields. "Green" benefits of this study to improve GaAs LED wafer processing yields included the elimination of a significant number of chemical pr...

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Bibliographische Detailangaben
Hauptverfasser: Evans, K., AlCorn, T., Hadizad, P., Edwards, K., Fischer, R., Nielsen, D., Richie, F., Saha, N.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Chemical processes
Electrons
Etching
Gallium arsenide
Light emitting diodes
Oxidation
Productivity
Surface cleaning
Surface contamination
Zinc
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Beschreibung
Zusammenfassung:A self directed process improvement team was initiated to streamline the GaAs light emitting diode (LED) wafer process flow and enhance product yields. "Green" benefits of this study to improve GaAs LED wafer processing yields included the elimination of a significant number of chemical processing steps. The new process is more environmentally "friendly" through the use of fewer and "milder" chemicals. Thus wafer production is enhanced with both a yield increase and a cost decrease due to lower levels of chemical usage.
DOI:10.1109/ISEE.1995.514985