Vibrating wheel micromechanical gyro

Vibrating wheel micromechanical gyro

Silicon micromechanical gyro performance has progressed to the threshold of useful initial applications, at least 1 deg/s. The vibrating wheel on a gimbal (VWOG) is a new gyro design with the promise of improved manufacturability. With a variety of accelerometers from which to choose, the advent of...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Greiff, P., Antkowiak, B., Campbell, J., Petrovich, A.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Accelerometers
Electrodes
Etching
Fabrication
Instruments
Laboratories
Large-scale systems
Micromechanical devices
Silicon
Wheels
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Beschreibung
Zusammenfassung:Silicon micromechanical gyro performance has progressed to the threshold of useful initial applications, at least 1 deg/s. The vibrating wheel on a gimbal (VWOG) is a new gyro design with the promise of improved manufacturability. With a variety of accelerometers from which to choose, the advent of the silicon gyro begins the era of silicon micromechanical inertial guidance.
DOI:10.1109/PLANS.1996.509053