Effect of pressure on the Q factor and the resonance frequency of SiN microcantilevers

A systematic study of the quality factor and resonance behavior of flexural and torsional modes of silicon nitride cantilevers vs. pressure is presented. Different anchoring, i.e., with and without undercut, is studied in the range between 3 mPa and atmospheric pressure. Thermal noise spectra of the...

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Bibliographische Detailangaben

Hauptverfasser:	Gavan, K.B., van der Heijden, J., van der Drift, E.W.J.M., van der Zant, H.S.J.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Absorption Atmospheric measurements Cooling Damping Eigenfrequency Microresonators Noise measurement Optical beams Optical noise Q factor Resonance Resonant frequency Silicon compounds
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