Voltage-controlled micromechanical SOI optical waveguides
We demonstrate the fabrication and the operation of voltage-controlled movable SOI optical waveguides. The fabrication process is based on surface micromachining the SOI substrates. The dynamic response is studied. Our results indicate that a switching voltage of only a few volts is enough to produc...
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| creator | Eng, T.T.H. Kan, S.C. Wong, G.K.L. |
| description | We demonstrate the fabrication and the operation of voltage-controlled movable SOI optical waveguides. The fabrication process is based on surface micromachining the SOI substrates. The dynamic response is studied. Our results indicate that a switching voltage of only a few volts is enough to produce a useful deflection amplitude of the guided light for typical fiber optic switching applications. A deflection amplitude of 290 /spl mu/m for the guided light is demonstrated with voltage-controlled electrostatic actuation. |
| doi_str_mv | 10.1109/TENCON.1995.496371 |
| format | Conference Proceeding |
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The fabrication process is based on surface micromachining the SOI substrates. The dynamic response is studied. Our results indicate that a switching voltage of only a few volts is enough to produce a useful deflection amplitude of the guided light for typical fiber optic switching applications. A deflection amplitude of 290 /spl mu/m for the guided light is demonstrated with voltage-controlled electrostatic actuation.</description><identifier>ISBN: 0780326245</identifier><identifier>ISBN: 9780780326248</identifier><identifier>DOI: 10.1109/TENCON.1995.496371</identifier><language>eng</language><publisher>IEEE</publisher><subject>Micromechanical devices ; Optical device fabrication ; Optical films ; Optical refraction ; Optical surface waves ; Optical variables control ; Optical waveguides ; Silicon ; Structural beams ; Voltage</subject><ispartof>1995 IEEE TENCON. IEEE Region 10 International Conference on Microelectronics and VLSI. 'Asia-Pacific Microelectronics 2000'. 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Proceedings</title><addtitle>TENCON</addtitle><description>We demonstrate the fabrication and the operation of voltage-controlled movable SOI optical waveguides. The fabrication process is based on surface micromachining the SOI substrates. The dynamic response is studied. Our results indicate that a switching voltage of only a few volts is enough to produce a useful deflection amplitude of the guided light for typical fiber optic switching applications. A deflection amplitude of 290 /spl mu/m for the guided light is demonstrated with voltage-controlled electrostatic actuation.</description><subject>Micromechanical devices</subject><subject>Optical device fabrication</subject><subject>Optical films</subject><subject>Optical refraction</subject><subject>Optical surface waves</subject><subject>Optical variables control</subject><subject>Optical waveguides</subject><subject>Silicon</subject><subject>Structural beams</subject><subject>Voltage</subject><isbn>0780326245</isbn><isbn>9780780326248</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>1995</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotj81Kw0AURgdEUGtfoKu8QOK9k_nJLCVULZRmYXVbZu7c1pGkKUlUfHvF-m3OWR34hFggFIjg7rbLTd1sCnROF8qZ0uKFuAFbQSmNVPpKzMfxHX6ntC61uhbutW8nf-Cc-uM09G3LMesSDX3H9OaPiXybPTerrD9Nf_7lP_nwkSKPt-Jy79uR5_-ciZeH5bZ-ytfN46q-X-cJQU250RogGKNMDM5qDDag98AKtHd70qgILFaERKEKkYk9Ruk4SCZpoy1nYnHuJmbenYbU-eF7dz5X_gARuEZN</recordid><startdate>1995</startdate><enddate>1995</enddate><creator>Eng, T.T.H.</creator><creator>Kan, S.C.</creator><creator>Wong, G.K.L.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>1995</creationdate><title>Voltage-controlled micromechanical SOI optical waveguides</title><author>Eng, T.T.H. ; Kan, S.C. ; Wong, G.K.L.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i104t-65500b6646db9751b7b1aa0e405a9fc514c0718c1ccb8bdecea1d29eb2ec27d73</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>1995</creationdate><topic>Micromechanical devices</topic><topic>Optical device fabrication</topic><topic>Optical films</topic><topic>Optical refraction</topic><topic>Optical surface waves</topic><topic>Optical variables control</topic><topic>Optical waveguides</topic><topic>Silicon</topic><topic>Structural beams</topic><topic>Voltage</topic><toplevel>online_resources</toplevel><creatorcontrib>Eng, T.T.H.</creatorcontrib><creatorcontrib>Kan, S.C.</creatorcontrib><creatorcontrib>Wong, G.K.L.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE/IET Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Eng, T.T.H.</au><au>Kan, S.C.</au><au>Wong, G.K.L.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Voltage-controlled micromechanical SOI optical waveguides</atitle><btitle>1995 IEEE TENCON. IEEE Region 10 International Conference on Microelectronics and VLSI. 'Asia-Pacific Microelectronics 2000'. Proceedings</btitle><stitle>TENCON</stitle><date>1995</date><risdate>1995</risdate><spage>195</spage><epage>197</epage><pages>195-197</pages><isbn>0780326245</isbn><isbn>9780780326248</isbn><abstract>We demonstrate the fabrication and the operation of voltage-controlled movable SOI optical waveguides. The fabrication process is based on surface micromachining the SOI substrates. The dynamic response is studied. Our results indicate that a switching voltage of only a few volts is enough to produce a useful deflection amplitude of the guided light for typical fiber optic switching applications. A deflection amplitude of 290 /spl mu/m for the guided light is demonstrated with voltage-controlled electrostatic actuation.</abstract><pub>IEEE</pub><doi>10.1109/TENCON.1995.496371</doi><tpages>3</tpages></addata></record> |
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| identifier | ISBN: 0780326245 |
| ispartof | 1995 IEEE TENCON. IEEE Region 10 International Conference on Microelectronics and VLSI. 'Asia-Pacific Microelectronics 2000'. Proceedings, 1995, p.195-197 |
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| language | eng |
| recordid | cdi_ieee_primary_496371 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Micromechanical devices Optical device fabrication Optical films Optical refraction Optical surface waves Optical variables control Optical waveguides Silicon Structural beams Voltage |
| title | Voltage-controlled micromechanical SOI optical waveguides |
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