Analysis of the different contributions to the response of SAW gas sensors

Numerical estimations of the mass and elastic loadings are performed for different possible material combinations. In order to do this, the density and elastic constants of the film are changed consequently and one by one for each of the combination selected in accordance with Farnell-Adler's t...

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Hauptverfasser: Anisimkin, V.I., Kotelyanskii, I.M., Fedosov, V.I., Caliendo, C., Verardi, P., Verona, E.
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creator Anisimkin, V.I.
Kotelyanskii, I.M.
Fedosov, V.I.
Caliendo, C.
Verardi, P.
Verona, E.
description Numerical estimations of the mass and elastic loadings are performed for different possible material combinations. In order to do this, the density and elastic constants of the film are changed consequently and one by one for each of the combination selected in accordance with Farnell-Adler's theory. In addition, the perturbation approach is applied to analyse the SAW gas response in analytical form. On considering, as an example, Pd coated SAW delay lines exposed to hydrogen, the relative changes in Pd parameters are measured, the mass and elastic loadings are estimated and the SAW hydrogen responses are theoretically predicted and experimentally verified. An increase of a factor 10 in the SAW gas response is demonstrated for Pd film deposited on different substrate materials and/or crystallographic orientations.
doi_str_mv 10.1109/ULTSYM.1995.495630
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ispartof 1995 IEEE Ultrasonics Symposium. Proceedings. An International Symposium, 1995, Vol.1, p.515-518 vol.1
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subjects Conductive films
Crystalline materials
Crystallography
Delay estimation
Delay lines
Gas detectors
Hydrogen
Phase change materials
Substrates
Surface acoustic waves
title Analysis of the different contributions to the response of SAW gas sensors
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