Electroplated thick CoNiMnP permanent magnet arrays for micromachined magnetic device applications

Electroplated thick CoNiMnP permanent magnet arrays for micromachined magnetic device applications have been designed, fabricated, and tested. The electroplated arrays contain 5000 magnets of 40 /spl mu/m/spl times/40 /spl mu/m/spl times/50 /spl mu/m in a cubic shape on the silicon membrane of 4.6 m...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Linkopoulos, T.M., Wenjin Zhang, Ahn, G.H.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Bidirectional control Biomembranes Coercive force Magnetic devices Microactuators Permanent magnets Shape Silicon Spirals Testing
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