Electroplated thick CoNiMnP permanent magnet arrays for micromachined magnetic device applications
Electroplated thick CoNiMnP permanent magnet arrays for micromachined magnetic device applications have been designed, fabricated, and tested. The electroplated arrays contain 5000 magnets of 40 /spl mu/m/spl times/40 /spl mu/m/spl times/50 /spl mu/m in a cubic shape on the silicon membrane of 4.6 m...
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| creator | Linkopoulos, T.M. Wenjin Zhang Ahn, G.H. |
| description | Electroplated thick CoNiMnP permanent magnet arrays for micromachined magnetic device applications have been designed, fabricated, and tested. The electroplated arrays contain 5000 magnets of 40 /spl mu/m/spl times/40 /spl mu/m/spl times/50 /spl mu/m in a cubic shape on the silicon membrane of 4.6 mm/spl times/4.6 mm /spl times/20 /spl mu/m, where the magnets have shown a fairly high magnetic vertical coercivity of 600 Oe, a retentivity of 0.2-0.3 Teslas, and a maximum energy density of 10 kJ/m/sup 3/. Using the electroplated magnet array, a proto-type bi-directional vertical microactuator on silicon membrane has been realized with integrated spiral coils. The magnet arrays realized in this work allow a low power consumption, a flexible bi-directional actuation, as well as a favorable CMOS compatibility. |
| doi_str_mv | 10.1109/MEMSYS.1996.493833 |
| format | Conference Proceeding |
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The electroplated arrays contain 5000 magnets of 40 /spl mu/m/spl times/40 /spl mu/m/spl times/50 /spl mu/m in a cubic shape on the silicon membrane of 4.6 mm/spl times/4.6 mm /spl times/20 /spl mu/m, where the magnets have shown a fairly high magnetic vertical coercivity of 600 Oe, a retentivity of 0.2-0.3 Teslas, and a maximum energy density of 10 kJ/m/sup 3/. Using the electroplated magnet array, a proto-type bi-directional vertical microactuator on silicon membrane has been realized with integrated spiral coils. The magnet arrays realized in this work allow a low power consumption, a flexible bi-directional actuation, as well as a favorable CMOS compatibility.</description><identifier>ISBN: 9780780329850</identifier><identifier>ISBN: 0780329856</identifier><identifier>DOI: 10.1109/MEMSYS.1996.493833</identifier><language>eng</language><publisher>IEEE</publisher><subject>Bidirectional control ; Biomembranes ; Coercive force ; Magnetic devices ; Microactuators ; Permanent magnets ; Shape ; Silicon ; Spirals ; Testing</subject><ispartof>Proceedings of Ninth International Workshop on Micro Electromechanical Systems, 1996, p.79-84</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c683-fe93041cf750c900025c623deeb698340b09eb5185e0010e41c58a3fe2e34ebb3</citedby></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/493833$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2056,4048,4049,27924,54919</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/493833$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Linkopoulos, T.M.</creatorcontrib><creatorcontrib>Wenjin Zhang</creatorcontrib><creatorcontrib>Ahn, G.H.</creatorcontrib><title>Electroplated thick CoNiMnP permanent magnet arrays for micromachined magnetic device applications</title><title>Proceedings of Ninth International Workshop on Micro Electromechanical Systems</title><addtitle>MEMSYS</addtitle><description>Electroplated thick CoNiMnP permanent magnet arrays for micromachined magnetic device applications have been designed, fabricated, and tested. The electroplated arrays contain 5000 magnets of 40 /spl mu/m/spl times/40 /spl mu/m/spl times/50 /spl mu/m in a cubic shape on the silicon membrane of 4.6 mm/spl times/4.6 mm /spl times/20 /spl mu/m, where the magnets have shown a fairly high magnetic vertical coercivity of 600 Oe, a retentivity of 0.2-0.3 Teslas, and a maximum energy density of 10 kJ/m/sup 3/. Using the electroplated magnet array, a proto-type bi-directional vertical microactuator on silicon membrane has been realized with integrated spiral coils. The magnet arrays realized in this work allow a low power consumption, a flexible bi-directional actuation, as well as a favorable CMOS compatibility.</description><subject>Bidirectional control</subject><subject>Biomembranes</subject><subject>Coercive force</subject><subject>Magnetic devices</subject><subject>Microactuators</subject><subject>Permanent magnets</subject><subject>Shape</subject><subject>Silicon</subject><subject>Spirals</subject><subject>Testing</subject><isbn>9780780329850</isbn><isbn>0780329856</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>1996</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotUMtqwzAQFJRCS-ofyEk_YHdlWY50LMZ9QNwWkktPQZLXjVpbNrIo5O9rcIaBOczsMgwhWwYZY6Aem7o5fB0yplSZFYpLzm9IonYSFvJcSQF3JJnnH1hQCJGXcE9M3aONYZx6HbGl8ezsL63Gd9f4TzphGLRHH-mgvz1GqkPQl5l2Y6CDs2EctD07v9ytvrO0xT9nkepp6p3V0Y1-fiC3ne5nTK66Icfn-li9pvuPl7fqaZ_aUvK0Q8WhYLbbCbBqaZgLW-a8RTSlkrwAAwqNYFIgAANcokJq3mGOvEBj-IZs17cOEU9TcIMOl9O6A_8HAXdVOg</recordid><startdate>1996</startdate><enddate>1996</enddate><creator>Linkopoulos, T.M.</creator><creator>Wenjin Zhang</creator><creator>Ahn, G.H.</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>1996</creationdate><title>Electroplated thick CoNiMnP permanent magnet arrays for micromachined magnetic device applications</title><author>Linkopoulos, T.M. ; Wenjin Zhang ; Ahn, G.H.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c683-fe93041cf750c900025c623deeb698340b09eb5185e0010e41c58a3fe2e34ebb3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>1996</creationdate><topic>Bidirectional control</topic><topic>Biomembranes</topic><topic>Coercive force</topic><topic>Magnetic devices</topic><topic>Microactuators</topic><topic>Permanent magnets</topic><topic>Shape</topic><topic>Silicon</topic><topic>Spirals</topic><topic>Testing</topic><toplevel>online_resources</toplevel><creatorcontrib>Linkopoulos, T.M.</creatorcontrib><creatorcontrib>Wenjin Zhang</creatorcontrib><creatorcontrib>Ahn, G.H.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Linkopoulos, T.M.</au><au>Wenjin Zhang</au><au>Ahn, G.H.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Electroplated thick CoNiMnP permanent magnet arrays for micromachined magnetic device applications</atitle><btitle>Proceedings of Ninth International Workshop on Micro Electromechanical Systems</btitle><stitle>MEMSYS</stitle><date>1996</date><risdate>1996</risdate><spage>79</spage><epage>84</epage><pages>79-84</pages><isbn>9780780329850</isbn><isbn>0780329856</isbn><abstract>Electroplated thick CoNiMnP permanent magnet arrays for micromachined magnetic device applications have been designed, fabricated, and tested. The electroplated arrays contain 5000 magnets of 40 /spl mu/m/spl times/40 /spl mu/m/spl times/50 /spl mu/m in a cubic shape on the silicon membrane of 4.6 mm/spl times/4.6 mm /spl times/20 /spl mu/m, where the magnets have shown a fairly high magnetic vertical coercivity of 600 Oe, a retentivity of 0.2-0.3 Teslas, and a maximum energy density of 10 kJ/m/sup 3/. Using the electroplated magnet array, a proto-type bi-directional vertical microactuator on silicon membrane has been realized with integrated spiral coils. The magnet arrays realized in this work allow a low power consumption, a flexible bi-directional actuation, as well as a favorable CMOS compatibility.</abstract><pub>IEEE</pub><doi>10.1109/MEMSYS.1996.493833</doi><tpages>6</tpages></addata></record> |
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| ispartof | Proceedings of Ninth International Workshop on Micro Electromechanical Systems, 1996, p.79-84 |
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| language | eng |
| recordid | cdi_ieee_primary_493833 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Bidirectional control Biomembranes Coercive force Magnetic devices Microactuators Permanent magnets Shape Silicon Spirals Testing |
| title | Electroplated thick CoNiMnP permanent magnet arrays for micromachined magnetic device applications |
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