Short loop monitoring of metal stepcoverage by simple electrical measurements

A metal stepcoverage monitoring method using simple electrical measurements has been developed to overcome drawbacks of the standard cross sectioning method. Application on Bicmos and bipolar processes show that (a) stepcoverage related design rules can be easily verified, (b) stepcoverage depends s...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	van der Pol, J.A., Ooms, E.R., Brugman, H.T.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	BiCMOS integrated circuits Condition monitoring Dielectrics Electric variables measurement Electromigration Measurement standards Open loop systems Production Standards development Surface resistance
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