Suspended Membrane Single Crystal Silicon Micro Hotplate for Differential Scanning Calorimetry

This paper introduces an array of single crystal silicon micro hotplates for differential scanning calorimetry. Based on heat transfer analysis considering tradeoffs between response time, temperature uniformity, and measurement sensitivity, suspended membrane micro hotplates with full backside rele...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Lee, J., Spadaccini, C.M., Mukerjee, E.V., King, W.P.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Biomembranes Calorimetry Delay Dielectric thin films Heating Polymer films Semiconductor device measurement Silicon Temperature measurement Temperature sensors
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