Advancements in Technology and Design of Biomimetic Flow-Sensor Arrays

This paper reports on recent developments to increase the performance of biomimetic flow-sensor arrays by means of several technological advancements in the fabrication procedures and corresponding sensor design optimizations. Advancements include fabrication procedures with higher process latitude...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Bruinink, C.M., Jaganatharaja, R.K., de Boer, M.J., Berenschot, E., Kolster, M.L., Lammerink, T.S.J., Wiegerink, R.J., Krijnen, G.J.M.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Acoustic sensors Bandwidth Biomembranes Biomimetics Biosensors Electrodes Fabrication Fluid flow measurement Hair Sensor arrays
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