Monolithic MEMS T-type Switch for Redundancy Switch Matrix Applications

This paper presents a novel approach to monolithically implementing RF MEMS T-type switches for redundancy switch matrix applications. The T-type switch performs three operational states: two turning states and one crossover state. A six-mask fabrication process is adapted to fabricate the proposed...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	King Yuk Chan, Daneshmand, M., Fomani, A.A., Mansour, R.R., Ramer, R.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Circuits Contacts Fabrication Frequency measurement Micromechanical devices Radio frequency Radiofrequency microelectromechanical systems Structural beams Switches Turning
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