Nitride-Based LEDs With a Hybrid Al Mirror + } /} DBR Backside Reflector

Nitride-based light-emitting diodes (LEDs) with a hybrid backside reflector combining a TiO 2 /SiO 2 distributed Bragg reflector (DBR) and an Al mirror were proposed and realized. It was found that we can significantly enhance the 35% reflectivity of the 2-pair TiO 2 /SiO 2 DBR to 94% by combining with Al mirror (hybrid reflector). Furthermore, reflectivity of the proposed reflector depends only slightly on incident light wavelength and the incident angle. With 350-mA current injection, it was found that the output powers were 145.7, 178.2, and 201.9 mW for the LEDs with 2-pair DBR, with an Al mirror and with a hybrid reflector, respectively, when packaged in TO-cups. It was also found that reliability for the LED with the hybrid reflector is good.