High-power microwave discharge for producing large-area surface-wave plasmas

The theory of surface-wave discharge is introduced. A novel structure of the slot antenna array is designed in this paper, and its excitation is numerical analyzed using dipole-antenna array model and FDTD method, respectively. A microwave discharge experiment is operated with this slot-antenna arra...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Chen Zhaoquan, Liu Minghai, Chen Wei, Luo Zhiqing, Tang Liang, Lan Chaohui, Hu Xiwei
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Antenna arrays Dipole antennas Finite difference methods Microwave antenna arrays Numerical simulation Plasma measurements Plasma simulation Plasma stability Slot antennas Surface discharges
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