Drive-Mode Control for Vibrational MEMS Gyroscopes

This paper presents a novel design methodology and hardware implementation for the drive-mode control of vibrational micro-electro-mechanical systems gyroscopes. Assuming that the sense mode (axis) of the gyroscope is operating under open loop, the drive-mode controller compensates an undesirable me...

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Veröffentlicht in:	IEEE transactions on industrial electronics (1982) 2009-04, Vol.56 (4), p.956-963
Hauptverfasser:	Lili Dong, Avanesian, D.
Format:	Artikel
Sprache:	eng
Schlagworte:	Analog implementation Arrays Beams (radiation) Circuit simulation Control systems Design methodology drive-mode control Gyroscopes Hardware micro-electro-mechanical systems (MEMS) Microelectromechanical systems Micromechanical devices Open loop systems Piezoelectricity Robust stability Simulation Tracking errors Trajectories Vibration control vibrational gyroscopes
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