Transparent conducting oxide development for electronics applications
We have employed both combinatorial composition spread and conventional single composition approaches to determine the relative roles of metals and oxygen stoichiometries on the opto-electronic properties of amorphous In-Zn-O (a-IZO) thin film transparent conductors. Two major results were found. Fi...
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creator | Perkins, J.D. Berry, J. J. van Hest, M.F.A.M. Cavendor, A.N. Leenheer, A.J. O'Hayre, R.P. Ginley, D.S. |
description | We have employed both combinatorial composition spread and conventional single composition approaches to determine the relative roles of metals and oxygen stoichiometries on the opto-electronic properties of amorphous In-Zn-O (a-IZO) thin film transparent conductors. Two major results were found. First, that the optimization of conductivity in a-IZO is a coupled process with the best metals composition depending upon the oxygen content of the sputter gas. Second, that the electron mobility as a function of carrier concentration is given by a common curve for all a-IZO films independent of the metals composition. |
doi_str_mv | 10.1109/ISAF.2008.4693955 |
format | Conference Proceeding |
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J.</creatorcontrib><creatorcontrib>van Hest, M.F.A.M.</creatorcontrib><creatorcontrib>Cavendor, A.N.</creatorcontrib><creatorcontrib>Leenheer, A.J.</creatorcontrib><creatorcontrib>O'Hayre, R.P.</creatorcontrib><creatorcontrib>Ginley, D.S.</creatorcontrib><creatorcontrib>National Renewable Energy Lab. (NREL), Golden, CO (United States)</creatorcontrib><title>Transparent conducting oxide development for electronics applications</title><title>2008 17th IEEE International Symposium on the Applications of Ferroelectrics</title><addtitle>ISAF</addtitle><description>We have employed both combinatorial composition spread and conventional single composition approaches to determine the relative roles of metals and oxygen stoichiometries on the opto-electronic properties of amorphous In-Zn-O (a-IZO) thin film transparent conductors. Two major results were found. 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Second, that the electron mobility as a function of carrier concentration is given by a common curve for all a-IZO films independent of the metals composition.</description><subject>Amorphous materials</subject><subject>Conductive films</subject><subject>Conductivity</subject><subject>Electrical resistance measurement</subject><subject>Electromagnetic wave absorption</subject><subject>ELECTRON MOBILITY</subject><subject>Indium</subject><subject>MATERIALS SCIENCE</subject><subject>Optical reflection</subject><subject>OPTIMIZATION</subject><subject>OXIDES</subject><subject>OXYGEN</subject><subject>SOLAR ENERGY</subject><subject>Solar Energy - Photovoltaics</subject><subject>Sputtering</subject><subject>Substrates</subject><subject>THIN FILMS</subject><subject>Zinc oxide</subject><issn>1099-4734</issn><issn>2375-0448</issn><isbn>9781424427444</isbn><isbn>1424427444</isbn><isbn>9781424427451</isbn><isbn>1424427452</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2008</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNpVkDtPwzAUhc1LopT-AMQSsaf4cR3bY1W1UKkSA2WOHMcGo9SJYoPg39eoXZjucD59OucidEfwnBCsHjevi_WcYiznUCmmOD9DMyUkAQpABXByjiaUCV5iAHnxLwO4RJPsUCUIBtfoJsZPjLOrggla7UYd4qBHG1Jh-tB-meTDe9H_-NYWrf22XT_s_0LXj4XtrEljH7yJhR6GzhudfB_iLbpyuot2drpT9LZe7ZbP5fblabNcbEtPiEila6RgxKqGgZOaWNCSc0krRxvdCNUa5YRwHKzTonK6pRIryIBsWJ7cApuih6O3j8nX0fhkzUduHXKtmmBKGagM3R8hb62th9Hv9fhbn97GDnllXQc</recordid><startdate>200802</startdate><enddate>200802</enddate><creator>Perkins, J.D.</creator><creator>Berry, J. J.</creator><creator>van Hest, M.F.A.M.</creator><creator>Cavendor, A.N.</creator><creator>Leenheer, A.J.</creator><creator>O'Hayre, R.P.</creator><creator>Ginley, D.S.</creator><general>IEEE</general><general>Piscataway, NJ: Institute of Electrical and Electronics Engineers, Inc. (IEEE)</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope><scope>OTOTI</scope></search><sort><creationdate>200802</creationdate><title>Transparent conducting oxide development for electronics applications</title><author>Perkins, J.D. ; Berry, J. J. ; van Hest, M.F.A.M. ; Cavendor, A.N. ; Leenheer, A.J. ; O'Hayre, R.P. ; Ginley, D.S.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i117t-fb8731e9b34f8a1e4a855826f2bab79dc9f77f54efa76fad280945828b3395d43</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2008</creationdate><topic>Amorphous materials</topic><topic>Conductive films</topic><topic>Conductivity</topic><topic>Electrical resistance measurement</topic><topic>Electromagnetic wave absorption</topic><topic>ELECTRON MOBILITY</topic><topic>Indium</topic><topic>MATERIALS SCIENCE</topic><topic>Optical reflection</topic><topic>OPTIMIZATION</topic><topic>OXIDES</topic><topic>OXYGEN</topic><topic>SOLAR ENERGY</topic><topic>Solar Energy - Photovoltaics</topic><topic>Sputtering</topic><topic>Substrates</topic><topic>THIN FILMS</topic><topic>Zinc oxide</topic><toplevel>online_resources</toplevel><creatorcontrib>Perkins, J.D.</creatorcontrib><creatorcontrib>Berry, J. J.</creatorcontrib><creatorcontrib>van Hest, M.F.A.M.</creatorcontrib><creatorcontrib>Cavendor, A.N.</creatorcontrib><creatorcontrib>Leenheer, A.J.</creatorcontrib><creatorcontrib>O'Hayre, R.P.</creatorcontrib><creatorcontrib>Ginley, D.S.</creatorcontrib><creatorcontrib>National Renewable Energy Lab. (NREL), Golden, CO (United States)</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection><collection>OSTI.GOV</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Perkins, J.D.</au><au>Berry, J. J.</au><au>van Hest, M.F.A.M.</au><au>Cavendor, A.N.</au><au>Leenheer, A.J.</au><au>O'Hayre, R.P.</au><au>Ginley, D.S.</au><aucorp>National Renewable Energy Lab. (NREL), Golden, CO (United States)</aucorp><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Transparent conducting oxide development for electronics applications</atitle><btitle>2008 17th IEEE International Symposium on the Applications of Ferroelectrics</btitle><stitle>ISAF</stitle><date>2008-02</date><risdate>2008</risdate><volume>1</volume><spage>1</spage><epage>2</epage><pages>1-2</pages><issn>1099-4734</issn><eissn>2375-0448</eissn><isbn>9781424427444</isbn><isbn>1424427444</isbn><eisbn>9781424427451</eisbn><eisbn>1424427452</eisbn><abstract>We have employed both combinatorial composition spread and conventional single composition approaches to determine the relative roles of metals and oxygen stoichiometries on the opto-electronic properties of amorphous In-Zn-O (a-IZO) thin film transparent conductors. Two major results were found. First, that the optimization of conductivity in a-IZO is a coupled process with the best metals composition depending upon the oxygen content of the sputter gas. Second, that the electron mobility as a function of carrier concentration is given by a common curve for all a-IZO films independent of the metals composition.</abstract><cop>United States</cop><pub>IEEE</pub><doi>10.1109/ISAF.2008.4693955</doi><tpages>2</tpages></addata></record> |
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identifier | ISSN: 1099-4734 |
ispartof | 2008 17th IEEE International Symposium on the Applications of Ferroelectrics, 2008, Vol.1, p.1-2 |
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language | eng |
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source | IEEE Electronic Library (IEL) Conference Proceedings |
subjects | Amorphous materials Conductive films Conductivity Electrical resistance measurement Electromagnetic wave absorption ELECTRON MOBILITY Indium MATERIALS SCIENCE Optical reflection OPTIMIZATION OXIDES OXYGEN SOLAR ENERGY Solar Energy - Photovoltaics Sputtering Substrates THIN FILMS Zinc oxide |
title | Transparent conducting oxide development for electronics applications |
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