Sequential experiments to characterize processing equipment-maximizing information content while restraining costs

As the semiconductor industry converts more of its fabs to relatively expensive 200 mm wafers, concerns for the costs of experimentation must increase. Many semiconductor processes involve 6 or more process inputs, and many of those inputs act together (factor interactions) or with nonlinear relatio...

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Veröffentlicht in:	IEEE transactions on components, packaging, and manufacturing technology. Part A packaging, and manufacturing technology. Part A, 1995-09, Vol.18 (3), p.492-499
1. Verfasser:	Reece, J.E.
Format:	Artikel
Sprache:	eng
Schlagworte:	Costs Design engineering Design for experiments Electronics industry Input variables Lifting equipment Manufacturing processes Power engineering and energy Power engineering computing Semiconductor process modeling
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