Towards automated handling on the nano-scale

Automated robot-based nanomanipulation is one of the key challenges of microsystem technology and nano-technology. Controlled, reproducible operation on the nano-scale will enable high-throughput manufacturing of revolutionary products and open up new application fields. The ultimate goal of these r...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Fatikow, S., Wich, T., Krohs, F., Dahmen, C.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Force Grippers Materials Nanobioscience Nanoscale devices Scanning electron microscopy Silicon
Online-Zugang:	Volltext bestellen
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