Towards automated handling on the nano-scale

Towards automated handling on the nano-scale

Automated robot-based nanomanipulation is one of the key challenges of microsystem technology and nano-technology. Controlled, reproducible operation on the nano-scale will enable high-throughput manufacturing of revolutionary products and open up new application fields. The ultimate goal of these r...

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Hauptverfasser: Fatikow, S., Wich, T., Krohs, F., Dahmen, C.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Force
Grippers
Materials
Nanobioscience
Nanoscale devices
Scanning electron microscopy
Silicon
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creator Fatikow, S.
Wich, T.
Krohs, F.
Dahmen, C.
description Automated robot-based nanomanipulation is one of the key challenges of microsystem technology and nano-technology. Controlled, reproducible operation on the nano-scale will enable high-throughput manufacturing of revolutionary products and open up new application fields. The ultimate goal of these research activities is the development of automated nanomanipulation processes to build a bridge between existing precise handling strategies for micro- and nano-scale objects and aspired high-throughput fabrication of micro- and nanosystems. This paper describes our current work on different problems of nanohandling automation, both by nanorobots inside a scanning electron microscope and by an atomic force microscope applied as a nanorobot.
doi_str_mv 10.1109/IROS.2008.4650818
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subjects Force
Grippers
Materials
Nanobioscience
Nanoscale devices
Scanning electron microscopy
Silicon
title Towards automated handling on the nano-scale
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