Continuously tunable RF-MEMS varactor for high power applications

A high power continuously tunable RF-MEMS capacitor (varactor) for frequencies from DC−4.0 GHz is presented. The device is specified for 0.8-1.6 pF analog tuning range and provides a Q factor of ≫100 for frequencies below 2.0 GHz. Using silicon bulk technology and wafer bonding techniques, RF and el...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Leidich, Stefan, Kurth, Steffen, Gessner, Thomas
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Capacitance continuously tunable Electrodes high power Radio frequency Resonant frequency RF-MEMS Silicon varactor Varactors
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