Multi-step powder casting and x-ray lithography of SU-8 resist for complicated 3D microstructures

This paper presents a method to realize complicated 3D microstructures for MEMS applications by multi-step SU-8 thick film preparation and X-ray lithography. SU-8 photoresist powder with solvent content of 7% is prepared by spin coating of standard SU-8 on a polymide sheet laminated aluminum plate....

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Phatthanakun, R., Songsiriritthigul, P., Klysubun, P., Chomnawang, N.
Format:	Tagungsbericht
Sprache:	eng
Online-Zugang:	Volltext bestellen
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