Failure analysis of 65nm technology node SRAM soft failure

In this paper, a real case of 65 nm technology node SRAM failure was studied. The failure of the SRAM is soft failure, so the traditional method was failed to localize the exact position of the failed transistor. To find the root cause, the biased current image-Atom Force Microscopy combined with At...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Chen, Changqing, Er, Eddie, Neo, Soh Ping, Loh, Sock Khim, Wang, Qingxiao, Teong, Jennifer
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Copper Failure analysis Force Logic gates Random access memory Resistance Transistors
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