MEMS IMU for AHRS applications

Northrop Grumman, LITEF is developing MEMS (micro-electro-mechanical systems) based Inertial Measurement Units (IMU) for future attitude and heading reference systems (AHRS) with a target accuracy of 5 deg/h for the gyroscopes and 2.5 mg for the accelerometers. Within the technology development phas...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Geiger, W., Bartholomeyczik, J., Breng, U., Gutmann, W., Hafen, M., Handrich, E., Huber, M., Jackle, A., Kempfer, U., Kopmann, H., Kunz, J., Leinfelder, P., Ohmberger, R., Probst, U., Ruf, M., Spahlinger, G., Rasch, A., Straub-Kalthoff, J., Stroda, M., Stumpf, K., Weber, C., Zimmermann, M., Zimmermann, S.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Accelerometers Acoustic testing Gyroscopes Measurement units Microelectromechanical systems Micromechanical devices Prototypes Pulse width modulation Semiconductor device measurement Temperature sensors
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