FIB-Sputtering Characteristic of Mold Material and Nano Grid Pattern Fabrication

Recently, FIB-Sputtering process has been applied to many micro-manufacturing fields such as semi-conductor industries, display industries and IT industries etc. because it is available to fabricate the micro 3D shape structure directly and more effectively than other machining processes. However, c...

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Bibliographische Detailangaben

Hauptverfasser:	Eun-Goo Kang, Byeong-Yeol Choi, Won-Pyo Hong, Hon-Zong Choi, Seok-Woo Lee
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	DLC Fabrication FIB-Sputtering Glassy Carbon Machinery production industries Machining Micro Mold Mold Material Productivity Rough surfaces Shape Surface charging Surface roughness Textile industry Three dimensional displays
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