Integration of Glass Layer for Meso and Micro-System Applications

With recent development, multi-functional platform with substrate based on ceramics composite technology, in particular low temperature co-fired ceramic (LTCC) multilayer technology, is gaining advantages over conventional silicon technology. LTCC offers ease of integration for both homogenous and h...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Tan, Y.M., Khoong, L.E., Lam, Y.C., Lu, C.W.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Bonding Ceramics Glass Nonhomogeneous media Optical device fabrication Optical devices Optical materials Semiconductor device measurement Silicon Temperature
Online-Zugang:	Volltext bestellen
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