Automatic mode matching control loop design and its application to the mode matched MEMS gyroscope

In this paper, a mode matching control loop is suggested for the matching of the resonant frequency of the sensing mode with that of the driving mode. Matching of two modes is critical issue of the MEMS vibratory gyroscope to achieve the high sensitivity of the sensor. A new mode matching control lo...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Byung Su Chang, Woon-Tahk Sung, Jang Gyu Lee, Kang-Yoon Lee, Sangkyung Sung
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Automatic control Equations Fabrication Gyroscopes Micromechanical devices Phase locked loops Resonance Resonant frequency Sensor systems Tuning
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