Automatic mode matching control loop design and its application to the mode matched MEMS gyroscope
In this paper, a mode matching control loop is suggested for the matching of the resonant frequency of the sensing mode with that of the driving mode. Matching of two modes is critical issue of the MEMS vibratory gyroscope to achieve the high sensitivity of the sensor. A new mode matching control lo...
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| creator | Byung Su Chang Woon-Tahk Sung Jang Gyu Lee Kang-Yoon Lee Sangkyung Sung |
| description | In this paper, a mode matching control loop is suggested for the matching of the resonant frequency of the sensing mode with that of the driving mode. Matching of two modes is critical issue of the MEMS vibratory gyroscope to achieve the high sensitivity of the sensor. A new mode matching control loop using the concept of phase locked loop (PLL) is proposed and analyzed. Through the computer simulation using MATLAB and experiments using a real MEMS gyroscope, it is verified that the proposed control loop design matches those two modes and correspondingly improves the sensitivity of a gyroscope. |
| doi_str_mv | 10.1109/ICVES.2007.4456398 |
| format | Conference Proceeding |
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Matching of two modes is critical issue of the MEMS vibratory gyroscope to achieve the high sensitivity of the sensor. A new mode matching control loop using the concept of phase locked loop (PLL) is proposed and analyzed. Through the computer simulation using MATLAB and experiments using a real MEMS gyroscope, it is verified that the proposed control loop design matches those two modes and correspondingly improves the sensitivity of a gyroscope.</description><identifier>ISBN: 9781424412655</identifier><identifier>ISBN: 142441265X</identifier><identifier>EISBN: 9781424412662</identifier><identifier>EISBN: 1424412668</identifier><identifier>DOI: 10.1109/ICVES.2007.4456398</identifier><language>eng</language><publisher>IEEE</publisher><subject>Automatic control ; Equations ; Fabrication ; Gyroscopes ; Micromechanical devices ; Phase locked loops ; Resonance ; Resonant frequency ; Sensor systems ; Tuning</subject><ispartof>2007 IEEE International Conference on Vehicular Electronics and Safety, 2007, p.1-6</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c139t-888bd0f320f6449b32ea6c701ca6ef9feb8bf59ccd7212a3147f53ef7dbded523</citedby></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/4456398$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,776,780,785,786,2052,27902,54895</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/4456398$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Byung Su Chang</creatorcontrib><creatorcontrib>Woon-Tahk Sung</creatorcontrib><creatorcontrib>Jang Gyu Lee</creatorcontrib><creatorcontrib>Kang-Yoon Lee</creatorcontrib><creatorcontrib>Sangkyung Sung</creatorcontrib><title>Automatic mode matching control loop design and its application to the mode matched MEMS gyroscope</title><title>2007 IEEE International Conference on Vehicular Electronics and Safety</title><addtitle>ICVES</addtitle><description>In this paper, a mode matching control loop is suggested for the matching of the resonant frequency of the sensing mode with that of the driving mode. 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Through the computer simulation using MATLAB and experiments using a real MEMS gyroscope, it is verified that the proposed control loop design matches those two modes and correspondingly improves the sensitivity of a gyroscope.</description><subject>Automatic control</subject><subject>Equations</subject><subject>Fabrication</subject><subject>Gyroscopes</subject><subject>Micromechanical devices</subject><subject>Phase locked loops</subject><subject>Resonance</subject><subject>Resonant frequency</subject><subject>Sensor systems</subject><subject>Tuning</subject><isbn>9781424412655</isbn><isbn>142441265X</isbn><isbn>9781424412662</isbn><isbn>1424412668</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2007</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNpVkL1OwzAYRY0QEqjkBWDxCyT4L3Y8VlGASq0YCqyVY39OjZI4SszQt6cSHWC65w7nDhehB0oKSol-2tSfzb5ghKhCiFJyXV2hTKuKCiYEZVKy63-9LG9RtixfhBCqpKBU3KF2_Z3iYFKweIgO8BntMYwdtnFMc-xxH-OEHSyhG7EZHQ5pwWaa-mDPUhxxijgd4Y8MDu-a3R53pzkuNk5wj2686RfILrlCH8_Ne_2ab99eNvV6m1vKdcqrqmod8ZwRL4XQLWdgpFWEWiPBaw9t1fpSW-sUo8xwKpQvOXjlWgeuZHyFHn93AwAcpjkMZj4dLs_wH3xyWKs</recordid><startdate>200712</startdate><enddate>200712</enddate><creator>Byung Su Chang</creator><creator>Woon-Tahk Sung</creator><creator>Jang Gyu Lee</creator><creator>Kang-Yoon Lee</creator><creator>Sangkyung Sung</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>200712</creationdate><title>Automatic mode matching control loop design and its application to the mode matched MEMS gyroscope</title><author>Byung Su Chang ; Woon-Tahk Sung ; Jang Gyu Lee ; Kang-Yoon Lee ; Sangkyung Sung</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c139t-888bd0f320f6449b32ea6c701ca6ef9feb8bf59ccd7212a3147f53ef7dbded523</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2007</creationdate><topic>Automatic control</topic><topic>Equations</topic><topic>Fabrication</topic><topic>Gyroscopes</topic><topic>Micromechanical devices</topic><topic>Phase locked loops</topic><topic>Resonance</topic><topic>Resonant frequency</topic><topic>Sensor systems</topic><topic>Tuning</topic><toplevel>online_resources</toplevel><creatorcontrib>Byung Su Chang</creatorcontrib><creatorcontrib>Woon-Tahk Sung</creatorcontrib><creatorcontrib>Jang Gyu Lee</creatorcontrib><creatorcontrib>Kang-Yoon Lee</creatorcontrib><creatorcontrib>Sangkyung Sung</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Byung Su Chang</au><au>Woon-Tahk Sung</au><au>Jang Gyu Lee</au><au>Kang-Yoon Lee</au><au>Sangkyung Sung</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Automatic mode matching control loop design and its application to the mode matched MEMS gyroscope</atitle><btitle>2007 IEEE International Conference on Vehicular Electronics and Safety</btitle><stitle>ICVES</stitle><date>2007-12</date><risdate>2007</risdate><spage>1</spage><epage>6</epage><pages>1-6</pages><isbn>9781424412655</isbn><isbn>142441265X</isbn><eisbn>9781424412662</eisbn><eisbn>1424412668</eisbn><abstract>In this paper, a mode matching control loop is suggested for the matching of the resonant frequency of the sensing mode with that of the driving mode. Matching of two modes is critical issue of the MEMS vibratory gyroscope to achieve the high sensitivity of the sensor. A new mode matching control loop using the concept of phase locked loop (PLL) is proposed and analyzed. Through the computer simulation using MATLAB and experiments using a real MEMS gyroscope, it is verified that the proposed control loop design matches those two modes and correspondingly improves the sensitivity of a gyroscope.</abstract><pub>IEEE</pub><doi>10.1109/ICVES.2007.4456398</doi><tpages>6</tpages></addata></record> |
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| ispartof | 2007 IEEE International Conference on Vehicular Electronics and Safety, 2007, p.1-6 |
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| language | eng |
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| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Automatic control Equations Fabrication Gyroscopes Micromechanical devices Phase locked loops Resonance Resonant frequency Sensor systems Tuning |
| title | Automatic mode matching control loop design and its application to the mode matched MEMS gyroscope |
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