A Highly pH-Sensitive Eelectrolyte Insulator Semi-conductor Element Using A Stack of Anodic Gd Oxide/Silicon Oxide

In this paper, the Gd 2 O 3 /SiO 2 stacks were fabricated in an anodic oxidation method and used as a pH-sensitive electrolyte insulator semiconductor (EIS) element for pH value test. Several outstanding results are obtained, they are: (1) The higher pH-value solution the EIS samples were immersed i...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Huang, C.T., Chen, M.Y., Chen, J.Y., Chen, S.N., Ko, H.H.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Capacitance Capacitance-voltage characteristics Etching Insulation Insulator testing Oxidation Semiconductor device testing Semiconductor films Silicon Voltage
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