Minor magnesium doping in P-type layer of InGaN/GaN MQW LED to enhance electrical and optical properties
In this study, the LED samples were grown by metalorganic chemical vapor deposition (MOCVD) on 430 mum-thick c-plan sapphire substrates. The layer sequence consisted of a 25.0 nm GaN nucleation layer followed by a 2.0 mum-thick undoped GaN buffer layer, a 2.0 mum-thick Si-doped GaN conduction layer,...
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creator | Meng-Fu Shih Yung-Hsiang Lin Chun-Wei Liao Cheng-Ying Yen Yi-Lun Chou Ray-Ming Lin |
description | In this study, the LED samples were grown by metalorganic chemical vapor deposition (MOCVD) on 430 mum-thick c-plan sapphire substrates. The layer sequence consisted of a 25.0 nm GaN nucleation layer followed by a 2.0 mum-thick undoped GaN buffer layer, a 2.0 mum-thick Si-doped GaN conduction layer, a active region composed of five 2.5 nm-thick In 0.23 Ga 0.77 N QWs separated by 12.0 nm-thick GaN barriers, followed by 15 pairs of Mg-doped AlGaN/GaN superlattice structure consisting of 3.0 nm AlGaN layers, and 3.0 nm GaN layers, a 30.0 nm-thick Mg-doped GaN cap layer. Finally, a 10.0 nm Mg-doped GaN contact layer was grown on the top of LED. |
doi_str_mv | 10.1109/ISDRS.2007.4422553 |
format | Conference Proceeding |
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The layer sequence consisted of a 25.0 nm GaN nucleation layer followed by a 2.0 mum-thick undoped GaN buffer layer, a 2.0 mum-thick Si-doped GaN conduction layer, a active region composed of five 2.5 nm-thick In 0.23 Ga 0.77 N QWs separated by 12.0 nm-thick GaN barriers, followed by 15 pairs of Mg-doped AlGaN/GaN superlattice structure consisting of 3.0 nm AlGaN layers, and 3.0 nm GaN layers, a 30.0 nm-thick Mg-doped GaN cap layer. Finally, a 10.0 nm Mg-doped GaN contact layer was grown on the top of LED.</description><identifier>ISBN: 9781424418916</identifier><identifier>ISBN: 1424418917</identifier><identifier>EISBN: 9781424418923</identifier><identifier>EISBN: 1424418925</identifier><identifier>DOI: 10.1109/ISDRS.2007.4422553</identifier><language>eng</language><publisher>IEEE</publisher><subject>Aluminum gallium nitride ; Chemical vapor deposition ; Doping ; Gallium nitride ; Light emitting diodes ; Magnesium ; MOCVD ; Optical buffering ; Optical superlattices ; Quantum well devices</subject><ispartof>2007 International Semiconductor Device Research Symposium, 2007, p.1-2</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/4422553$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,776,780,785,786,2052,27904,54898</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/4422553$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Meng-Fu Shih</creatorcontrib><creatorcontrib>Yung-Hsiang Lin</creatorcontrib><creatorcontrib>Chun-Wei Liao</creatorcontrib><creatorcontrib>Cheng-Ying Yen</creatorcontrib><creatorcontrib>Yi-Lun Chou</creatorcontrib><creatorcontrib>Ray-Ming Lin</creatorcontrib><title>Minor magnesium doping in P-type layer of InGaN/GaN MQW LED to enhance electrical and optical properties</title><title>2007 International Semiconductor Device Research Symposium</title><addtitle>ISDRS</addtitle><description>In this study, the LED samples were grown by metalorganic chemical vapor deposition (MOCVD) on 430 mum-thick c-plan sapphire substrates. 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Finally, a 10.0 nm Mg-doped GaN contact layer was grown on the top of LED.</description><subject>Aluminum gallium nitride</subject><subject>Chemical vapor deposition</subject><subject>Doping</subject><subject>Gallium nitride</subject><subject>Light emitting diodes</subject><subject>Magnesium</subject><subject>MOCVD</subject><subject>Optical buffering</subject><subject>Optical superlattices</subject><subject>Quantum well devices</subject><isbn>9781424418916</isbn><isbn>1424418917</isbn><isbn>9781424418923</isbn><isbn>1424418925</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2007</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNpVkL1OwzAUhY0QEqj0BWC5L5DW13aceERtKZFa_lqJsXLim9YodSInDH17EHRhODrfWb7hMHaHfILIzbTYzN83E8F5NlFKiDSVF2xsshyVUApzI-Tlv436mo37_pNzjplWqM0NO6x9aCMc7T5Q77-O4NrOhz34AK_JcOoIGnuiCG0NRVja5-lPYP32AavFHIYWKBxsqAiooWqIvrIN2OCg7YZf7mLbURw89bfsqrZNT-Nzj9j2cbGdPSWrl2Uxe1gl3vAh0apSaZVZXXNpLBqdaSyd01rkzkokySmXZa6dUqWjFFOVks6kcCVKK3klR-z-T-uJaNdFf7TxtDvfI78BILFX4A</recordid><startdate>200712</startdate><enddate>200712</enddate><creator>Meng-Fu Shih</creator><creator>Yung-Hsiang Lin</creator><creator>Chun-Wei Liao</creator><creator>Cheng-Ying Yen</creator><creator>Yi-Lun Chou</creator><creator>Ray-Ming Lin</creator><general>IEEE</general><scope>6IE</scope><scope>6IL</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIL</scope></search><sort><creationdate>200712</creationdate><title>Minor magnesium doping in P-type layer of InGaN/GaN MQW LED to enhance electrical and optical properties</title><author>Meng-Fu Shih ; Yung-Hsiang Lin ; Chun-Wei Liao ; Cheng-Ying Yen ; Yi-Lun Chou ; Ray-Ming Lin</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i90t-64c45c7a6f039a196761bdd6628da31e30e83b86d44bde51545e6732db13a30c3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2007</creationdate><topic>Aluminum gallium nitride</topic><topic>Chemical vapor deposition</topic><topic>Doping</topic><topic>Gallium nitride</topic><topic>Light emitting diodes</topic><topic>Magnesium</topic><topic>MOCVD</topic><topic>Optical buffering</topic><topic>Optical superlattices</topic><topic>Quantum well devices</topic><toplevel>online_resources</toplevel><creatorcontrib>Meng-Fu Shih</creatorcontrib><creatorcontrib>Yung-Hsiang Lin</creatorcontrib><creatorcontrib>Chun-Wei Liao</creatorcontrib><creatorcontrib>Cheng-Ying Yen</creatorcontrib><creatorcontrib>Yi-Lun Chou</creatorcontrib><creatorcontrib>Ray-Ming Lin</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan All Online (POP All Online) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP All) 1998-Present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Meng-Fu Shih</au><au>Yung-Hsiang Lin</au><au>Chun-Wei Liao</au><au>Cheng-Ying Yen</au><au>Yi-Lun Chou</au><au>Ray-Ming Lin</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Minor magnesium doping in P-type layer of InGaN/GaN MQW LED to enhance electrical and optical properties</atitle><btitle>2007 International Semiconductor Device Research Symposium</btitle><stitle>ISDRS</stitle><date>2007-12</date><risdate>2007</risdate><spage>1</spage><epage>2</epage><pages>1-2</pages><isbn>9781424418916</isbn><isbn>1424418917</isbn><eisbn>9781424418923</eisbn><eisbn>1424418925</eisbn><abstract>In this study, the LED samples were grown by metalorganic chemical vapor deposition (MOCVD) on 430 mum-thick c-plan sapphire substrates. The layer sequence consisted of a 25.0 nm GaN nucleation layer followed by a 2.0 mum-thick undoped GaN buffer layer, a 2.0 mum-thick Si-doped GaN conduction layer, a active region composed of five 2.5 nm-thick In 0.23 Ga 0.77 N QWs separated by 12.0 nm-thick GaN barriers, followed by 15 pairs of Mg-doped AlGaN/GaN superlattice structure consisting of 3.0 nm AlGaN layers, and 3.0 nm GaN layers, a 30.0 nm-thick Mg-doped GaN cap layer. Finally, a 10.0 nm Mg-doped GaN contact layer was grown on the top of LED.</abstract><pub>IEEE</pub><doi>10.1109/ISDRS.2007.4422553</doi><tpages>2</tpages></addata></record> |
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identifier | ISBN: 9781424418916 |
ispartof | 2007 International Semiconductor Device Research Symposium, 2007, p.1-2 |
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language | eng |
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source | IEEE Electronic Library (IEL) Conference Proceedings |
subjects | Aluminum gallium nitride Chemical vapor deposition Doping Gallium nitride Light emitting diodes Magnesium MOCVD Optical buffering Optical superlattices Quantum well devices |
title | Minor magnesium doping in P-type layer of InGaN/GaN MQW LED to enhance electrical and optical properties |
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