On the study of parylene-N for millimeter-wave integrated circuits

In this work Parylene-N is investigated as a passivation layer for microwave and millimeter-wave integrated circuits (MMIC). The electrical and mechanical properties of this material show great potential for various applications in integrated circuits especially at higher frequencies. For the first...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Lahiji, Rosa R., Sharifi, Hasan, Mohammadi, Saeed, Katehi, Linda P.B.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Coatings Coplanar waveguides Insertion loss Millimeter wave integrated circuits MMICs Optical ring resonators Passivation Propagation losses Sensor arrays Thickness measurement
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