7E-2 A De-Coupled Stacked Bulk Acoustic Resonator (DSBAR) Filter With 2 dB Bandwidth > 4

Coupled resonator filters extend the use of classical FBAR/BAW filters by enabling them to convert single-ended signals into differential signals while using a much smaller wafer real estate. In lieu of the traditional multi-layer de-coupling structure we introduce a novel technique in which only a...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Small, M.K., Jamneala, T., Callaghan, L.A., Larson, J.D., Ruby, R.C.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Bandwidth Electrodes Electrostatic discharge Etching Film bulk acoustic resonators Frequency Impedance matching Polymer films Resonator filters Surface acoustic waves
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