Synthesis and Characterization of PZT Ferroelectric Nanocrystals Current Measurement

Ferroelectric lead zirconium titanate (PZT) has been used in FeRAMs, which are expected to become common large capacity devices. We have extensively studied PZT thin films and their micro-processing. However, there are several problems of degradation by crystal defects at grain boundaries in thin fi...

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Bibliographische Detailangaben

Hauptverfasser:	Kubo, K., Echizen, M., Nishida, T., Takeda, T., Uchiyama, K., Shiosaki, T.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Atomic force microscopy Crystallization Current measurement Ferroelectric materials Grain boundaries Nanocrystals Position control Radio frequency Sputtering Zirconium
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