Polymer Mass Loading of CMOS/MEMS Microslot Cantilever for Gravimetric Sensing

A post CMOS/MEMS fabrication method using inkjet printing of mass sensitive polymer into slotted microcantilevers is explored with the goal of increasing the polymer to cantilever mass ratio. This method involves wicking the dissolved polymer, poly(butyl methacrylate) (PBMA), into a microslot cantil...

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Bibliographische Detailangaben

Hauptverfasser:	Bedair, S.S., Fedder, G.K.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Chemical analysis Coatings Electronic noses Electrostatics Ink jet printing Micromechanical devices Polymers Resonance Sensor arrays Surface tension
Online-Zugang:	Volltext bestellen
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