High Performance SOI-CMOS Wall Shear Stress Sensors

Here we present for the first time, a novel silicon on insulator (SOI) complementary metal oxide semiconductor (CMOS) MEMS thermal shear stress sensor for turbulent flow measurements based on aluminum hot-film as a sensing element. These devices have been fabricated using commercial 1 mum SOI-CMOS p...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Haneef, I., Ali, S.Z., Udrea, F., Coull, J.D., Hodson, H.P.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Fluid flow measurement Metal-insulator structures Micromechanical devices Silicon on insulator technology Stress measurement Temperature sensors Thermal conductivity Thermal sensors Thermal stresses Time measurement
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