Novel 3-Axis Gyroscope on a Single Chip using SOI-Technology

In this paper a novel 3-axis micro-machined gyroscope based on SOI-technology is presented. Compared to three-axis acceleration sensors, high performance gyroscopes having three sensing axis on a single silicon chip are not present on the market due to the more complex functionality based on the Cor...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Traechtler, M., Link, T., Dehnert, J., Auber, J., Nommensen, P., Manoli, Y.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Acceleration Assembly Costs Electrodes Gyroscopes Measurement units Packaging Performance loss Prototypes Silicon on insulator technology
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