Piezoelectric Micromachined Ultrasonic Transducers Based on P(VDF-TrFE) Copolymer Thin Films

Representing a new approach to ultrasound generation and detection, study on piezoelectric micromachined ultrasonic transducers (pMUTs) has been a growing research area in recent years. Intensive research work has been directed on the deposition of lead zirconate titanate (PZT) films on silicon subs...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Chen Chao, Tin-Yan Lam, Kin-Wing Kwok, Chan, H.L.W.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Coupling circuits Crystallization Micromachining Piezoelectric films Piezoelectric thin film Semiconductor films Silicon Temperature control Titanium compounds Ultrasonic imaging Ultrasonic transducer array Ultrasonic transducer arrays Ultrasonic transducers
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!