Design for Reliability (DfR) in MEMS using Worst-Case Methods
The growing applications of microsystem devices in extreme environments have a great impact on the rising importance of their reliability studies. Reliability study in MEMS lacks the availability of methods and tools to analyze them in a quick and efficient way. In this paper, we present a novel app...
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| creator | Vudathu, Shyam Praveen Lavu, Srikanth Laur, Rainer |
| description | The growing applications of microsystem devices in extreme environments have a great impact on the rising importance of their reliability studies. Reliability study in MEMS lacks the availability of methods and tools to analyze them in a quick and efficient way. In this paper, we present a novel approach for reliability analysis in MEMS using worst-case methods. The method facilitates the designers to find out the critical operational parameters of the device with respect to a particular functional specification. This paper also introduces a reliability coefficient instigated from an inherent advantage of the worst-case methods. |
| doi_str_mv | 10.1109/IPFA.2007.4378098 |
| format | Conference Proceeding |
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| ispartof | 2007 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits, 2007, p.267-272 |
| issn | 1946-1542 1946-1550 |
| language | eng |
| recordid | cdi_ieee_primary_4378098 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Accuracy Actuators Availability Critical Operational Parameters Design methodology Failure analysis MEMS in Extreme Environments Microelectromechanical devices Microelectromechanical systems Micromechanical devices Operational Parameters Packaging Performance analysis Reliability Analysis Worst-Case Reliability Coefficient (WCRC) |
| title | Design for Reliability (DfR) in MEMS using Worst-Case Methods |
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