A Near-Infrared, Continuous Wavelength, In-Lens Spectroscopic Photon Emission Microscope System

A Near-Infrared, Continuous Wavelength, In-Lens Spectroscopic Photon Emission Microscope System

A near-infrared continuous wavelength, in-lens spectroscopic photon emission microscope has been developed. The dispersive element is a three-element prism which has been specially designed to disperse light from 0.9 mum to 1.6 mum about the optical axis. The system has been used to perform frontsid...

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Hauptverfasser: Tan, S., Toh, K., Jch Phang, Dsh Chan, Cm Chua, Koh, L.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Dispersion
Microscopy
MOSFETs
Optical design
Optical filters
Optical saturation
P-n junctions
Silicon
Spectroscopy
Stimulated emission
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creator Tan, S.
Toh, K.
Jch Phang
Dsh Chan
Cm Chua
Koh, L.
description A near-infrared continuous wavelength, in-lens spectroscopic photon emission microscope has been developed. The dispersive element is a three-element prism which has been specially designed to disperse light from 0.9 mum to 1.6 mum about the optical axis. The system has been used to perform frontside and backside spectroscopy on forward and reverse-biased p-n junctions and saturated nMOSFETs. The difference in the frontside and backside spectra is due to the "silicon filter effect" for the backside spectra and the optical effects of the dielectrics for the frontside spectra.
doi_str_mv 10.1109/IPFA.2007.4378092
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identifier ISSN: 1946-1542
ispartof 2007 14th International Symposium on the Physical and Failure Analysis of Integrated Circuits, 2007, p.240-244
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1946-1550
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source IEEE Electronic Library (IEL) Conference Proceedings
subjects Dispersion
Microscopy
MOSFETs
Optical design
Optical filters
Optical saturation
P-n junctions
Silicon
Spectroscopy
Stimulated emission
title A Near-Infrared, Continuous Wavelength, In-Lens Spectroscopic Photon Emission Microscope System
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