Vortex Generation and Pixel Calibration Using a Spatial Light Modulator for Maskless Lithography

We present aerial images demonstrating the generation of an isolated optical vortex via and its through-focus characteristics using a SLM (spatial light modulator) for optical maskless lithography. Aerial images show that a 4 phase step vortex can be formed by a group of 2 x 2 pixels. The vortex sho...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Woong Jung, Jen-Shiang Wang, Solgaard, O.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Calibration Character generation Image generation Lithography Maskless Lithography Mirrors Optical modulation Optical sensors Optical vortices Pixel Pixel Calibration Spatial Light Modulator Testing Vortex Via
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