Design and Control of a Micro Linear Motor with Integrated Magnetic Guidance
This paper reports on a micro linear stepping motor with an integrated magnetic guidance which is built up using micro fabrication techniques like sputtering, UV depth lithography and electroplating. The results of FEM simulations in order to design the motor and the necessary changes in the layout...
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creator | Demmig, S. Gehrking, R. Wiedmann, K. Mertens, A. Ponick, B. |
description | This paper reports on a micro linear stepping motor with an integrated magnetic guidance which is built up using micro fabrication techniques like sputtering, UV depth lithography and electroplating. The results of FEM simulations in order to design the motor and the necessary changes in the layout for the purpose of levitating the traveller without additional components are presented. Using the same windings for the thrust and the levitation force a special control strategy is described and afterwards verified by simulations. At the end measurement results to underlay the FEM model are shown. |
doi_str_mv | 10.1109/07IAS.2007.84 |
format | Conference Proceeding |
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The results of FEM simulations in order to design the motor and the necessary changes in the layout for the purpose of levitating the traveller without additional components are presented. Using the same windings for the thrust and the levitation force a special control strategy is described and afterwards verified by simulations. 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The results of FEM simulations in order to design the motor and the necessary changes in the layout for the purpose of levitating the traveller without additional components are presented. Using the same windings for the thrust and the levitation force a special control strategy is described and afterwards verified by simulations. At the end measurement results to underlay the FEM model are shown.</description><subject>Coils</subject><subject>Fabrication</subject><subject>Force control</subject><subject>Magnetic flux</subject><subject>Magnetic levitation</subject><subject>Micromotors</subject><subject>Reluctance motors</subject><subject>Sputtering</subject><subject>Stators</subject><subject>Teeth</subject><issn>0197-2618</issn><issn>2576-702X</issn><isbn>9781424412594</isbn><isbn>1424412595</isbn><isbn>9781424412600</isbn><isbn>1424412609</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2007</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNpNj8tKxDAYRuMNrOMsXbnJC7T-ubRJlkMdx0KLCxXcDWmT1MiYShoR396CLlx9iwOH8yF0RaAgBNQNiGbzWFAAUUh-hNZKSMIp54RWAMcoo6WocgH05eQ_KxU_RRkQJXJaEXmOLub5DQCYrEiG2ls7-zFgHQyup5DidMCTwxp3fogTbn2wOuJuSlPEXz694iYkO0adrMGdHoNNfsC7T290GOwlOnP6MNv1367Q8932qb7P24ddU2_a3BNRppwYSQlw7gbmlk4JXLFheeX0kmSE4AZUr4UGJXvXGymdkH1lnB76UlEObIWuf73eWrv_iP5dx-89Z1xIxtgPmDJQmQ</recordid><startdate>200709</startdate><enddate>200709</enddate><creator>Demmig, S.</creator><creator>Gehrking, R.</creator><creator>Wiedmann, K.</creator><creator>Mertens, A.</creator><creator>Ponick, B.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>200709</creationdate><title>Design and Control of a Micro Linear Motor with Integrated Magnetic Guidance</title><author>Demmig, S. ; Gehrking, R. ; Wiedmann, K. ; Mertens, A. ; Ponick, B.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-1d821044fc3f97880493c007fa861d774d09ba7a098bfbd88f78b6dfacb592403</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2007</creationdate><topic>Coils</topic><topic>Fabrication</topic><topic>Force control</topic><topic>Magnetic flux</topic><topic>Magnetic levitation</topic><topic>Micromotors</topic><topic>Reluctance motors</topic><topic>Sputtering</topic><topic>Stators</topic><topic>Teeth</topic><toplevel>online_resources</toplevel><creatorcontrib>Demmig, S.</creatorcontrib><creatorcontrib>Gehrking, R.</creatorcontrib><creatorcontrib>Wiedmann, K.</creatorcontrib><creatorcontrib>Mertens, A.</creatorcontrib><creatorcontrib>Ponick, B.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Demmig, S.</au><au>Gehrking, R.</au><au>Wiedmann, K.</au><au>Mertens, A.</au><au>Ponick, B.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Design and Control of a Micro Linear Motor with Integrated Magnetic Guidance</atitle><btitle>2007 IEEE Industry Applications Annual Meeting</btitle><stitle>IAS</stitle><date>2007-09</date><risdate>2007</risdate><spage>518</spage><epage>522</epage><pages>518-522</pages><issn>0197-2618</issn><eissn>2576-702X</eissn><isbn>9781424412594</isbn><isbn>1424412595</isbn><eisbn>9781424412600</eisbn><eisbn>1424412609</eisbn><abstract>This paper reports on a micro linear stepping motor with an integrated magnetic guidance which is built up using micro fabrication techniques like sputtering, UV depth lithography and electroplating. The results of FEM simulations in order to design the motor and the necessary changes in the layout for the purpose of levitating the traveller without additional components are presented. Using the same windings for the thrust and the levitation force a special control strategy is described and afterwards verified by simulations. At the end measurement results to underlay the FEM model are shown.</abstract><pub>IEEE</pub><doi>10.1109/07IAS.2007.84</doi><tpages>5</tpages></addata></record> |
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identifier | ISSN: 0197-2618 |
ispartof | 2007 IEEE Industry Applications Annual Meeting, 2007, p.518-522 |
issn | 0197-2618 2576-702X |
language | eng |
recordid | cdi_ieee_primary_4347833 |
source | IEEE Electronic Library (IEL) Conference Proceedings |
subjects | Coils Fabrication Force control Magnetic flux Magnetic levitation Micromotors Reluctance motors Sputtering Stators Teeth |
title | Design and Control of a Micro Linear Motor with Integrated Magnetic Guidance |
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